发明申请
- 专利标题： PATTERN TRANSFER METHOD AND IMPRINT DEVICE
- 专利标题（中）： 图案转印方法和印刷装置
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申请号： US13366792申请日： 2012-02-06
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公开(公告)号： US20120195993A1公开(公告)日： 2012-08-02
- 发明人: Takashi ANDO , Susumu KOMORIYA , Masahiko OGINO , Akihiro MIYAUCHI
- 申请人： Takashi ANDO , Susumu KOMORIYA , Masahiko OGINO , Akihiro MIYAUCHI
- 优先权： JP2006-212732 20060804
- 主分类号： B29C59/16
- IPC分类号： B29C59/16
摘要：
In order to allow for aligning a relative position between a transferred object and a stamper with high accuracy without providing an alignment pattern in the transferred object, there are provided: a pattern transfer method, including: when adjusting the relative position between the stamper and the transferred object, a step of detecting at least two or more edge positions of the transferred object and calculating an arbitrary point from the detected edge positions; a step of detecting a position of the stamper from an edge of the stamper or an alignment mark formed in the stamper; and a step of adjusting the relative position between the transferred object and the stamper from the arbitrary point and the position of the stamper; and an imprint device using the same.
公开/授权文献
- US08491291B2 Pattern transfer method and imprint device 公开/授权日：2013-07-23
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