- 专利标题: VIBRATION-ACTUATED MICRO MIRROR DEVICE
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申请号: US13450574申请日: 2012-04-19
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公开(公告)号: US20120200902A1公开(公告)日: 2012-08-09
- 发明人: YU-JEN WANG , CHIEN-SHIEN YEH , CHUNG-DE CHEN , HUNG-CHUNG LI
- 申请人: YU-JEN WANG , CHIEN-SHIEN YEH , CHUNG-DE CHEN , HUNG-CHUNG LI
- 申请人地址: TW Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu
- 优先权: TW099127428 20100817
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.
公开/授权文献
- US08325405B2 Vibration-actuated micro mirror device 公开/授权日:2012-12-04