公开(公告)号：US08325405B2

公开(公告)日：2012-12-04

申请号：US13450574

申请日：2012-04-19

申请人： Yu-Jen Wang ,  Chien-Shien Yeh ,  Chung-De Chen ,  Hung-Chung Li

发明人： Yu-Jen Wang ,  Chien-Shien Yeh ,  Chung-De Chen ,  Hung-Chung Li

IPC分类号： G02B26/08

CPC分类号： G02B26/0858 ,  G02B26/101

摘要： The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

公开(公告)号：US20120218612A1

公开(公告)日：2012-08-30

申请号：US13104122

申请日：2011-05-10

申请人： Pin Chang ,  Chung-De Chen ,  Chien-Shien Yeh ,  Hung-Chung Li

发明人： Pin Chang ,  Chung-De Chen ,  Chien-Shien Yeh ,  Hung-Chung Li

IPC分类号： G02B26/10

CPC分类号： H01L41/0933 ,  G02B26/0858 ,  G02B26/101 ,  H02N2/0015 ,  H02N2/108

摘要： A two-dimensional scanning and reflecting device includes a vibration component and a scanning component. The vibration component has a free end. The scanning component includes a frame body, a mass block, and a mirror. The frame body is connected to the free end of the vibration component. A natural frequency of the mirror corresponds to a second frequency. The mass block is disposed on the frame body in an eccentric manner, and the mass block and the natural frequency of the mirror correspond to a first frequency. When the vibration component receives a multi-frequency signal having the first frequency and the second frequency, the mirror vibrates in an axial direction with the first frequency, and vibrates in another axial direction with the second frequency.

摘要翻译： 二维扫描和反射装置包括振动分量和扫描分量。 振动部件有自由端。 扫描部件包括框架体，质量块和反射镜。 框架主体连接到振动部件的自由端。 镜子的固有频率对应于第二频率。 质量块以偏心的方式设置在框架体上，并且质量块和镜的固有频率对应于第一频率。 当振动分量接收到具有第一频率和第二频率的多频信号时，反射镜以第一频率沿轴向振动，并以另一个频率在另一个轴向振动。

公开(公告)号：US08218214B2

公开(公告)日：2012-07-10

申请号：US12963024

申请日：2010-12-08

申请人： Yu-Jen Wang ,  Chien-Shien Yeh ,  Chung-De Chen ,  Hung-Chung Li

发明人： Yu-Jen Wang ,  Chien-Shien Yeh ,  Chung-De Chen ,  Hung-Chung Li

IPC分类号： G02B26/08

CPC分类号： G02B26/0858 ,  G02B26/101

摘要： The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

摘要翻译： 本发明提供了一种振动致动的微反射镜装置，其包括具有摆动框架和反射镜的基板以及具有联接到基板的第一和第二振动结构的振动部分，其中第一振动结构被驱动以产生 第一复波由第一和第二波信号形成，而第二振动结构被驱动以产生由第三和第四波信号形成的第二复波，并且第一和第三波信号以相同频率形成，并且 而第二和第四波信号以相同频率但相反的相位形成。 第一和第二复合波激活基板，使得摆动框架围绕第一轴线旋转，同时反射镜绕第二轴线旋转。

公开(公告)号：US20100149614A1

公开(公告)日：2010-06-17

申请号：US12566079

申请日：2009-09-24

申请人： MING-CHIEH CHOU ,  Pin Chang ,  Hung-Chung Li ,  Chung-De Chen

发明人： MING-CHIEH CHOU ,  Pin Chang ,  Hung-Chung Li ,  Chung-De Chen

IPC分类号： G02B26/10

CPC分类号： G02B26/085 ,  G02B26/101

摘要： An optical scanner including a substrate, a driving component, and an optical reflector is provided. The driving component is disposed on the substrate and has a first hole. The driving component can swing about a first axis by a time-varied magnetic force. The optical reflector has a reflective surface and is disposed in the first hole. The optical reflector can swing about a second axis by a Lorentz force. The first axis is essentially perpendicular to the second axis. The first axis and the second axis are both essentially parallel to the reflective surface.

摘要翻译： 提供了包括基板，驱动部件和光反射器的光学扫描器。 驱动部件设置在基板上并具有第一孔。 驱动部件可以通过时变磁力围绕第一轴线摆动。 光反射器具有反射表面并设置在第一孔中。 光学反射器可以通过洛伦兹力绕第二轴摆动。 第一轴线基本上垂直于第二轴线。 第一轴线和第二轴线基本上平行于反射表面。

公开(公告)号：US20130057936A1

公开(公告)日：2013-03-07

申请号：US13667093

申请日：2012-11-02

申请人： YU-JEN WANG ,  CHIEN-SHIEN YEH ,  CHUNG-DE CHEN ,  HUNG-CHUNG LI

发明人： YU-JEN WANG ,  CHIEN-SHIEN YEH ,  CHUNG-DE CHEN ,  HUNG-CHUNG LI

IPC分类号： G02B26/08

CPC分类号： G02B26/0858 ,  G02B26/101

摘要： A vibration-actuated micro mirror device comprises a substrate, a swinging frame, a reflection mirror, and a vibration part. The swinging frame is rotatably arranged within a first accommodating space formed on the substrate. The reflection mirror is rotatably arranged within a second accommodating space formed on the swinging frame. The vibration part further comprises a plate coupled to the substrate, and a first and a second vibration structures. The first and the second vibration structures are coupled to the plate and are spaced a distance away from each other, wherein the first vibration structure receives a first driving signal having a first frequency and the second vibration structure receives a second driving signal having a second frequency smaller than the first frequency, thereby enabling the swinging frame to rotate about the first axis while enabling the reflection mirror to rotate about the second axis.

摘要翻译： 振动致动的微反射镜装置包括基板，摆动框架，反射镜和振动部件。 摆动框架可旋转地布置在形成在基板上的第一容纳空间内。 反射镜可旋转地布置在形成在摆动框架上的第二容纳空间内。 振动部分还包括联接到基板的板，以及第一和第二振动结构。 第一振动结构和第二振动结构耦合到板并且彼此间隔开一定距离，其中第一振动结构接收具有第一频率的第一驱动信号，并且第二振动结构接收具有第二频率的第二驱动信号 小于第一频率，从而使得摆动框架能够围绕第一轴线旋转，同时使得反射镜能够围绕第二轴线旋转。

公开(公告)号：US20120044555A1

公开(公告)日：2012-02-23

申请号：US12963024

申请日：2010-12-08

申请人： YU-JEN WANG ,  Chien-Shien Yeh ,  Chung-De Chen ,  Hung-Chung Li

发明人： YU-JEN WANG ,  Chien-Shien Yeh ,  Chung-De Chen ,  Hung-Chung Li

IPC分类号： G02B26/08

CPC分类号： G02B26/0858 ,  G02B26/101

摘要： The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

摘要翻译： 本发明提供了一种振动致动的微反射镜装置，其包括具有摆动框架和反射镜的基板以及具有联接到基板的第一和第二振动结构的振动部分，其中第一振动结构被驱动以产生 第一复波由第一和第二波信号形成，而第二振动结构被驱动以产生由第三和第四波信号形成的第二复波，并且第一和第三波信号以相同频率形成，并且 而第二和第四波信号以相同频率但相反的相位形成。 第一和第二复合波激活基板，使得摆动框架围绕第一轴线旋转，同时反射镜绕第二轴线旋转。

公开(公告)号：US08508827B2

公开(公告)日：2013-08-13

申请号：US13667093

申请日：2012-11-02

申请人： Yu-Jen Wang ,  Chien-Shien Yeh ,  Chung-De Chen ,  Hung-Chung Li

发明人： Yu-Jen Wang ,  Chien-Shien Yeh ,  Chung-De Chen ,  Hung-Chung Li

IPC分类号： G02B26/08

CPC分类号： G02B26/0858 ,  G02B26/101

摘要： A vibration-actuated micro mirror device comprises a substrate, a swinging frame, a reflection mirror, and a vibration part. The swinging frame is rotatably arranged within a first accommodating space formed on the substrate. The reflection mirror is rotatably arranged within a second accommodating space formed on the swinging frame. The vibration part further comprises a plate coupled to the substrate, and a first and a second vibration structures. The first and the second vibration structures are coupled to the plate and are spaced a distance away from each other, wherein the first vibration structure receives a first driving signal having a first frequency and the second vibration structure receives a second driving signal having a second frequency smaller than the first frequency, thereby enabling the swinging frame to rotate about the first axis while enabling the reflection mirror to rotate about the second axis.

摘要翻译： 振动致动的微反射镜装置包括基板，摆动框架，反射镜和振动部件。 摆动框架可旋转地布置在形成在基板上的第一容纳空间内。 反射镜可旋转地布置在形成在摆动框架上的第二容纳空间内。 振动部分还包括联接到基板的板，以及第一和第二振动结构。 第一振动结构和第二振动结构耦合到板并且彼此间隔开一定距离，其中第一振动结构接收具有第一频率的第一驱动信号，并且第二振动结构接收具有第二频率的第二驱动信号 小于第一频率，从而使得摆动框架能够围绕第一轴线旋转，同时使得反射镜能够围绕第二轴线旋转。

公开(公告)号：US20120200902A1

公开(公告)日：2012-08-09

申请号：US13450574

申请日：2012-04-19

申请人： YU-JEN WANG ,  CHIEN-SHIEN YEH ,  CHUNG-DE CHEN ,  HUNG-CHUNG LI

发明人： YU-JEN WANG ,  CHIEN-SHIEN YEH ,  CHUNG-DE CHEN ,  HUNG-CHUNG LI

IPC分类号： G02B26/08

CPC分类号： G02B26/0858 ,  G02B26/101

摘要： The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.

公开(公告)号：US07990595B1

公开(公告)日：2011-08-02

申请号：US12827039

申请日：2010-06-30

申请人： Ming-Chieh Chou ,  Pin Chang ,  Hung-Chung Li ,  Chung-De Chen

发明人： Ming-Chieh Chou ,  Pin Chang ,  Hung-Chung Li ,  Chung-De Chen

IPC分类号： G02B26/08

CPC分类号： G02B26/085 ,  G02B26/101

摘要： An optical multi-ring scanner is disclosed, which comprises: a substrate; an outer ring driving element, disposed inside the substrate and configured symmetrically at two sides thereof with a pair of first arms that are connected respectively to the substrate; at least one inner ring driving element, each configured with a first inner ring driver in a manner that the first inner ring driver has a pair of second arms symmetrically disposed at a top side and a bottom side thereof while being connected to the outer ring driving element; and a mirror element, disposed inside the first inner ring driver and having a pair of third arms symmetrically disposed at a top side of a bottom side thereof; wherein, the third arm is disposed coaxial with the second arm while enabling the first arm to be disposed perpendicular to the second arm and the third arm.

摘要翻译： 公开了一种光学多环扫描器，其包括：基板; 外环驱动元件，设置在所述基板的内部，并且在其两侧对称地配置有分别连接到所述基板的一对第一臂; 至少一个内环驱动元件，每个内环驱动元件均以第一内环驱动器的形式配置，使得第一内环驱动器具有对称地设置在其顶侧和底侧的一对第二臂，同时连接到外环驱动 元件; 以及镜子元件，其设置在所述第一内圈驱动器内，并且具有对称地设置在其底侧的顶侧的一对第三臂; 其中，所述第三臂与所述第二臂同轴设置，同时能够使所述第一臂垂直于所述第二臂和所述第三臂设置。

公开(公告)号：US08537450B2

公开(公告)日：2013-09-17

申请号：US13104122

申请日：2011-05-10

申请人： Pin Chang ,  Chung-De Chen ,  Chien-Shien Yeh ,  Hung-Chung Li

发明人： Pin Chang ,  Chung-De Chen ,  Chien-Shien Yeh ,  Hung-Chung Li

IPC分类号： G02B26/08

CPC分类号： H01L41/0933 ,  G02B26/0858 ,  G02B26/101 ,  H02N2/0015 ,  H02N2/108

摘要： A two-dimensional scanning and reflecting device includes a vibration component and a scanning component. The vibration component has a free end. The scanning component includes a frame body, a mass block, and a mirror. The frame body is connected to the free end of the vibration component. A natural frequency of the mirror corresponds to a second frequency. The mass block is disposed on the frame body in an eccentric manner, and the mass block and the natural frequency of the mirror correspond to a first frequency. When the vibration component receives a multi-frequency signal having the first frequency and the second frequency, the mirror vibrates in an axial direction with the first frequency, and vibrates in another axial direction with the second frequency.

摘要翻译： 二维扫描和反射装置包括振动分量和扫描分量。 振动部件有自由端。 扫描部件包括框体，质量块和反射镜。 框架主体连接到振动部件的自由端。 镜子的固有频率对应于第二频率。 质量块以偏心的方式设置在框架体上，并且质量块和镜的固有频率对应于第一频率。 当振动分量接收到具有第一频率和第二频率的多频信号时，反射镜以第一频率沿轴向振动，并以另一个频率在另一个轴向振动。