发明申请
- 专利标题： PHOTOCATALYTIC REACTIONS IN NANO-IMPRINT LITHOGRAPHY PROCESSES
- 专利标题（中）： 纳米印刷方法中的光催化反应
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申请号： US13446364申请日： 2012-04-13
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公开(公告)号： US20120201969A1公开(公告)日： 2012-08-09
- 发明人: Edward B. Fletcher , Frank Y. Xu
- 申请人： Edward B. Fletcher , Frank Y. Xu
- 申请人地址： US TX Austin
- 专利权人： MOLECULAR IMPRINTS, INC.
- 当前专利权人： MOLECULAR IMPRINTS, INC.
- 当前专利权人地址： US TX Austin
- 主分类号： C08F2/46
- IPC分类号： C08F2/46 ; C08J7/04 ; B29C59/02
摘要：
An imprint lithography template having a photoactive coating adhered to a surface of the template. Irradiation of the photoactive coating promotes cleaning of the template by decomposition of organic material proximate the template (e.g., organic material adsorbed on the template). An imprint lithography system may be configured such that template cleaning is achieved during formation of a patterned layer on an imprint lithography substrate. Cleaning of the template during an imprint lithography process reduces down-time that may be associated with template maintenance.