发明申请
- 专利标题: HEATER BLOCK FOR A RAPID THERMAL PROCESSING APPARATUS
- 专利标题(中): 用于快速热处理装置的加热器块
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申请号: US13391410申请日: 2010-08-04
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公开(公告)号: US20120207456A1公开(公告)日: 2012-08-16
- 发明人: Chang Kyo Kim , Tae Jong Ki , Choul Soo Kim , Ki Nam Kim
- 申请人: Chang Kyo Kim , Tae Jong Ki , Choul Soo Kim , Ki Nam Kim
- 申请人地址: KR Hwaseong-si, Gyeonggi-do
- 专利权人: AP SYSTEMS INC.
- 当前专利权人: AP SYSTEMS INC.
- 当前专利权人地址: KR Hwaseong-si, Gyeonggi-do
- 优先权: KR10-2009-0077425 20090821
- 国际申请: PCT/KR2010/005119 WO 20100804
- 主分类号: F27D11/12
- IPC分类号: F27D11/12
摘要:
The present invention relates to a heater block for a rapid thermal processing apparatus, and more particularly, to a heater block in which heating lamps are densely arranged in a tessellation. The tessellation has a structure such that the plurality of heating lamps are arranged at right angles to form a zigzag line, and the thus-formed zigzagged line is repeated such that the zigzagged line is combined with the adjacent zigzagged line. According to the present invention, a temperature gradient caused by a void between heating lamps is prevented, and heating lamps are densely arranged to increase heat density for a heat radiation area as opposed to conventional heater blocks, thus achieving improved heat treatment efficiency using less energy. In addition, fully uniform temperature control is enabled, in terms of sector allocated temperature control, even when the area to be independently controlled is enlarged as opposed to conventional heater blocks, thereby simplifying the configuration of a temperature control circuit.
公开/授权文献
- US08913884B2 Heater block for a rapid thermal processing apparatus 公开/授权日:2014-12-16
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