发明申请
US20120212820A1 OPTICAL DIFFRACTION GRATINGS AND METHODS FOR MANUFACTURING SAME 有权
光学衍射光栅及其制造方法

OPTICAL DIFFRACTION GRATINGS AND METHODS FOR MANUFACTURING SAME
摘要:
Described herein are diffraction gratings and methods for the manufacture thereof. One method comprises applying a force to a substrate to strain the substrate, disposing a thin film on at least a portion of the substrate, and reducing the force applied to the substrate, thereby causing the thin film to buckle.
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