发明申请
- 专利标题: OPTICAL DIFFRACTION GRATINGS AND METHODS FOR MANUFACTURING SAME
- 专利标题(中): 光学衍射光栅及其制造方法
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申请号: US13357269申请日: 2012-01-24
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公开(公告)号: US20120212820A1公开(公告)日: 2012-08-23
- 发明人: Hanqing Jiang , Hongbin Yu , Cunjiang Yu , Kevin O'Brien , Yong-Hang Zhang
- 申请人: Hanqing Jiang , Hongbin Yu , Cunjiang Yu , Kevin O'Brien , Yong-Hang Zhang
- 主分类号: G02B5/18
- IPC分类号: G02B5/18 ; B05D5/06 ; B05D3/12 ; C23C14/34
摘要:
Described herein are diffraction gratings and methods for the manufacture thereof. One method comprises applying a force to a substrate to strain the substrate, disposing a thin film on at least a portion of the substrate, and reducing the force applied to the substrate, thereby causing the thin film to buckle.
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