发明申请
US20120214100A1 RESIST COMPOSITION AND PATTERNING PROCESS USING THE SAME 审中-公开
使用它的耐腐蚀组合物和图案处理方法

RESIST COMPOSITION AND PATTERNING PROCESS USING THE SAME
摘要:
There is disclosed a resist composition, wherein the composition is used in a lithography and comprises at least: a polymer (A) that becomes a base resin whose alkaline-solubility changes by an acid, a photo acid generator (B) generating a sulfonic acid represented by the following general formula (1) by responding to a high energy beam, and a polymer additive (C) represented by the following general formula (2). There can be provided a resist composition showing not only excellent lithography properties but also a high receding contact angle, and in addition, being capable of suppressing a blob defect in both the immersion exposures using and not using a top coat; and a patterning process using the same.
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