发明申请
- 专利标题: RESIST COMPOSITION AND PATTERNING PROCESS USING THE SAME
- 专利标题(中): 使用它的耐腐蚀组合物和图案处理方法
-
申请号: US13396081申请日: 2012-02-14
-
公开(公告)号: US20120214100A1公开(公告)日: 2012-08-23
- 发明人: Tomohiro Kobayashi , Youichi Ohsawa , Yuji Harada , Yuki Suka
- 申请人: Tomohiro Kobayashi , Youichi Ohsawa , Yuji Harada , Yuki Suka
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2011-034748 20110221
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/027
摘要:
There is disclosed a resist composition, wherein the composition is used in a lithography and comprises at least: a polymer (A) that becomes a base resin whose alkaline-solubility changes by an acid, a photo acid generator (B) generating a sulfonic acid represented by the following general formula (1) by responding to a high energy beam, and a polymer additive (C) represented by the following general formula (2). There can be provided a resist composition showing not only excellent lithography properties but also a high receding contact angle, and in addition, being capable of suppressing a blob defect in both the immersion exposures using and not using a top coat; and a patterning process using the same.
信息查询
IPC分类: