发明申请
- 专利标题： METHOD FOR CLEARING NATIVE OXIDE
- 专利标题（中）： 用于清除原料氧化物的方法
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申请号： US13468042申请日： 2012-05-10
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公开(公告)号： US20120220134A1公开(公告)日： 2012-08-30
- 发明人: Yen-Chu Chen , Teng-Chun Tsai , Chien-Chung Huang , Keng-Jen Liu
- 申请人： Yen-Chu Chen , Teng-Chun Tsai , Chien-Chung Huang , Keng-Jen Liu
- 主分类号： H01L21/461
- IPC分类号： H01L21/461 ; B08B5/00
摘要：
A method for clearing native oxide is described. A substrate is provided, including an exposed portion whereon a native oxide layer has been formed. A clearing process is performed to the substrate using nitrogen trifluoride (NF3) and ammonia (NH3) as a reactant gas, wherein the volumetric flow rate of NF3 is greater than that of NH3.
公开/授权文献
- US08536060B2 Method for clearing native oxide 公开/授权日：2013-09-17
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