发明申请
- 专利标题: IMPRINTING DEVICE AND IMPRINTING METHOD
- 专利标题(中): 印刷装置和印刷方法
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申请号: US13471573申请日: 2012-05-15
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公开(公告)号: US20120223461A1公开(公告)日: 2012-09-06
- 发明人: Yoshiaki Takaya , Yuji Hashima , Yoshihisa Hayashida , Hirosuke Kawaguchi , Satoru Tanaka , Akihiko Kanai , Kazuaki Uehara
- 申请人: Yoshiaki Takaya , Yuji Hashima , Yoshihisa Hayashida , Hirosuke Kawaguchi , Satoru Tanaka , Akihiko Kanai , Kazuaki Uehara
- 申请人地址: JP Kanagawa
- 专利权人: SCIVAX CORPORATION
- 当前专利权人: SCIVAX CORPORATION
- 当前专利权人地址: JP Kanagawa
- 优先权: JP2007-335093 20071226
- 主分类号: B29C59/02
- IPC分类号: B29C59/02 ; B29C35/08
摘要:
The present invention provides an imprinting device and an imprinting method which can uniformly apply pressure between a mold and a molding object and which can increase and decrease a temperature at a fast speed. An imprinting device is for transferring a pattern on a mold to a film molding object, and comprises a stage for holding the mold, a pressurizing-chamber casing which configures a pressurizing-chamber together with the molding object, sealing means which airtightly seals a space between the pressurizing-chamber casing and the molding object, opening and closing means which opens and closes the space between the pressurizing-chamber casing and the molding object, pressurizing means which adjusts atmospheric pressure in the pressurizing-chamber, heating means which heats either one of or both of the mold and the molding object, and degassing means which eliminates any gas present between the mold and the molding object.
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