发明申请
- 专利标题： CONTROL VALVE DEVICE
- 专利标题（中）： 控制阀装置
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申请号： US13508448申请日： 2010-10-29
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公开(公告)号： US20120241023A1公开(公告)日： 2012-09-27
- 发明人: Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanikawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
- 申请人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanikawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
- 申请人地址： JP Osaka-shi, Osaka JP Sendai-shi, Miyagi JP Tokyo
- 专利权人： Fujikin Incorporated,Tohoku University,Tokyo Electron Limited
- 当前专利权人： Fujikin Incorporated,Tohoku University,Tokyo Electron Limited
- 当前专利权人地址： JP Osaka-shi, Osaka JP Sendai-shi, Miyagi JP Tokyo
- 优先权： JP2009-256210 20091109
- 国际申请： PCT/JP2010/069262 WO 20101029
- 主分类号： F16K31/128
- IPC分类号： F16K31/128 ; F16K1/34
摘要：
A control valve device develops opening/closing accuracy of a valve assembly. The valve head 310a is configured to open and close a transfer path formed in the valve housing 305 by transmitting the power to the valve assembly 310 from the power transmission member according to a pressure ratio between working fluid supplied to the first space Us and the second space Ls, respectively. The valve head has a Vickers hardness larger than a Vickers hardness of a valve seat of the transfer path to be in contact with the valve head, and a hardness difference therebetween is set to be about 200 Hv to about 300 Hv.
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