公开(公告)号：US09163743B2

公开(公告)日：2015-10-20

申请号：US13505620

申请日：2010-11-04

申请人： Atsushi Hidaka ,  Kaoru Hirata ,  Masaaki Nagase ,  Nobukazu Ikeda ,  Ryousuke Dohi ,  Kouji Nishino

发明人： Atsushi Hidaka ,  Kaoru Hirata ,  Masaaki Nagase ,  Nobukazu Ikeda ,  Ryousuke Dohi ,  Kouji Nishino

IPC分类号： G05D7/06 ,  F16K31/00 ,  F16K7/14 ,  F16K25/00

CPC分类号： F16K31/007 ,  F16K7/14 ,  F16K25/005 ,  G05D7/0629 ,  Y10T137/6416 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/7761

摘要： A piezoelectrically driven valve and a piezoelectrically driven fluid control device are provided that may control a fluid even if the temperature of the fluid is higher than an operating temperature range of a piezoelectric actuator. The piezoelectrically driven valve includes a valve element for opening and closing a fluid passage, a piezoelectric actuator for driving the valve element by utilizing extension of a piezoelectric element, and a radiation spacer that lifts and supports the piezoelectric actuator away from the fluid passage, and radiates heat that is transferred from fluid flowing in the fluid passage to the piezoelectric actuator, and preferably further includes a support cylinder that houses and supports both of the piezoelectric actuator and the radiation spacer, wherein the support cylinder is made of a material with the same thermal expansion coefficient as that of the radiation spacer, at least at a portion for housing the radiation spacer.

摘要翻译： 提供了一种压电驱动阀和压电驱动的流体控制装置，其可以控制流体，即使流体的温度高于压电致动器的工作温度范围。 压电驱动阀包括用于打开和关闭流体通道的阀元件，通过利用压电元件的延伸来驱动阀元件的压电致动器，以及将压电致动器提升和支撑远离流体通道的辐射间隔件，以及 辐射从在流体通道中流动的流体转移到压电致动器的热量，并且优选地还包括容纳和支撑压电致动器和辐射间隔物的支撑筒，其中支撑筒由具有相同材料的材料制成 至少在用于容纳辐射间隔物的部分处，与辐射间隔物的热膨胀系数相同。

公开(公告)号：US20140299206A1

公开(公告)日：2014-10-09

申请号：US14343226

申请日：2012-07-17

申请人： Masaaki Nagase ,  Kaoru Hirata ,  Atushi Hidaka ,  Kouji Nishino ,  Nobukazu Ikeda ,  Takeshi Nakamura

发明人： Masaaki Nagase ,  Kaoru Hirata ,  Atushi Hidaka ,  Kouji Nishino ,  Nobukazu Ikeda ,  Takeshi Nakamura

IPC分类号： F17D3/00

CPC分类号： F17D3/00 ,  C23C16/4482 ,  C23C16/45561 ,  G05D11/135 ,  Y10T137/8158

摘要： An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc.

摘要翻译： 能够精确稳定地调节载气和原料气体的混合气体中的原料浓度的装置，以高精度地控制流量，将混合气体供给到处理室，从而检测蒸发浓度 混合气体中的原料气体容易且高精度地实时显示浓度，而不使用昂贵的浓度计等。

公开(公告)号：US08833730B2

公开(公告)日：2014-09-16

申请号：US13389671

申请日：2010-11-05

申请人： Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K31/02 ,  F16K25/00 ,  F16K31/44 ,  F16K31/00 ,  H02K5/00 ,  F16K31/04 ,  F16K7/16 ,  F16K31/524

CPC分类号： F16K7/16 ,  F16K31/047 ,  F16K31/52408

摘要： A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.

摘要翻译： 凸轮控制阀包括具有流体通道和阀座的阀壳体，阀座位于阀座上以打开和关闭流体通道;阀杆，其压紧阀盘，使其接触阀座;凸轮作用 在阀杆上保持下降，电动机旋转凸轮，保持电动机的电动机支架，固定在阀壳体上的支撑框架，并支撑电动机支架使其垂直移动;弹性构件，将电动机支架偏压 支撑框架的上侧部分和高度可调节的螺钉，使马达夹持器从支撑框架上悬挂起来，并且相对于支撑框架调节马达夹持器的高度，其中高度可调节螺钉可滑动地插入到上侧部分 的支撑框架并拧入电机支架。

公开(公告)号：US20140162094A1

公开(公告)日：2014-06-12

申请号：US14126445

申请日：2012-06-13

申请人： Atsushi Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Seichin Kinuta ,  Yoshiaki Saita ,  Masashi Kobayashi

发明人： Atsushi Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Seichin Kinuta ,  Yoshiaki Saita ,  Masashi Kobayashi

IPC分类号： H01G11/04 ,  H01M2/36

CPC分类号： H01G11/04 ,  H01G11/14 ,  H01G11/58 ,  H01G11/84 ,  H01M2/361 ,  Y02E60/13

摘要： The purpose of the present invention is to provide an electrochemical element to which a high-concentration and high-viscosity electrolyte is supplied. The electrolyte is dispersed and supplied instantaneously to the electrochemical element in a small fixed quantity.

摘要翻译： 本发明的目的是提供一种供应高浓度和高粘度电解质的电化学元件。 电解液以小的固定量瞬时分散并供给电化学元件。

公开(公告)号：US08714188B2

公开(公告)日：2014-05-06

申请号：US13239715

申请日：2011-09-22

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Ryutaro Nishimura

IPC分类号： G05D7/06

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到 在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从 通过调节控制信号Sc进行电 - 气转换。

公开(公告)号：US08496022B2

公开(公告)日：2013-07-30

申请号：US10561514

申请日：2004-06-10

申请人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama

发明人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama

IPC分类号： G05D11/13

CPC分类号： G05D7/00 ,  G05D7/0623 ,  G05D7/0652 ,  G05D7/0658 ,  G05D7/0664 ,  G05D11/132 ,  Y10T137/0379 ,  Y10T137/0396 ,  Y10T137/2521 ,  Y10T137/2529 ,  Y10T137/2562 ,  Y10T137/263 ,  Y10T137/2663 ,  Y10T137/7761 ,  Y10T137/8175

摘要： The invention supplies a quantity Q of gas while dividing at flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller. A total quantity Q=Q1+Q2 of gas is supplied into a chamber at flow rate Q1 and Q2 through shower plates fixed to ends of branch supply lines by providing open/close valves with a plurality of branch supply lines GL1 and GL2, respectively, to supply the specified quantity of gas from the gas supply facility, and by utilizing bypass line BL1 on the downstream side of the open/close valve OV1 and branched from GL1 ,bypass line BL2 on the downstream side of the open/close valve OV2 and branched from GL2 ,pressure type division quantity controller connected to the bypass line BL1 and the bypass line BL2 ,a sensor measuring pressure inside branch supply line GL1 ,and another sensor measuring pressure inside branch supply line GL2.

摘要翻译： 本发明提供一种气体量Q，同时以具有流量控制器的气体供给设备的流量比Q1 / Q2分压。 通过分别提供具有多个分支供应线GL1和GL2的开闭阀将气体的总量Q = Q1 + Q2以流量Q1和Q2供给到固定到分支供应管线的端部的喷淋板， 从气体供给装置供给规定量的气体，通过在开/关阀OV1的下游侧利用旁路管线BL1，从开关阀OV2的下游侧的GL1分支的旁通管线BL2， 从GL2分支，连接到旁路线BL1和旁路线BL2的压力分型量控制器，测量分支供给线GL1内的压力的传感器和测量分支供给线GL2内的压力的另一传感器。

公开(公告)号：US20130084059A1

公开(公告)日：2013-04-04

申请号：US13563983

申请日：2012-08-01

申请人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Masaaki Nagase ,  Satoru Yamashita ,  Atsushi Hidaka ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Keiji Hirao

发明人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Masaaki Nagase ,  Satoru Yamashita ,  Atsushi Hidaka ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Keiji Hirao

IPC分类号： C23C14/00 ,  F22B1/28

CPC分类号： C23C16/4483 ,  F22B1/284

摘要： A vaporizer, capable of stabilizing the behavior of pressure inside the vaporizer, includes a chamber having an inlet and an outlet, a heating device that heats the inside of the chamber, a partition wall structure 13 that is provided inside the vaporizer and partitions the liquid material inside the chamber into a plurality of sections, and liquid distribution portions 20 that are provided at the lower portion of the partition wall structure 13 and that allow liquid distribution among the sections partitioned by the partition wall structure 13, and the partition wall structure includes a grid-like, honeycomb-shaped, mesh-like, or pipe-shaped partition wall.

摘要翻译： 能够稳定蒸发器内的压力行为的蒸发器包括具有入口和出口的室，加热室内的加热装置，设置在蒸发器内部并分隔液体的分隔壁结构13 室内的材料分成多个部分，分隔部分20设置在分隔壁结构13的下部并且允许在由分隔壁结构13分隔的部分之间进行液体分配，以及分隔壁结构包括 网状，蜂窝状，网状或管状隔壁。

公开(公告)号：US20130025718A1

公开(公告)日：2013-01-31

申请号：US13520824

申请日：2010-10-22

申请人： Masaaki Nagase ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Masaaki Nagase ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F17D1/00

CPC分类号： B01J4/02 ,  G05D11/132 ,  H01L21/67017 ,  Y10T137/87249

摘要： A mixed gas supply device includes a plurality of gas supply lines arranged in parallel that include flow rate control devices and outlet side switching valves, wherein gas outlets of respective outlet side switching valves communicate with a manifold, and another gas supply line at a position close to a mixed gas outlet of the manifold supplies a low flow rate gas, wherein an outlet side of the flow rate control device and an inlet side of the outlet side switching valve are hermetically connected via an outlet side connecting fitting of the flow rate control device and a mounting table having a gas passage, wherein a small hole portion is provided at a part of a flow passage at the outlet side connecting fitting and/or a flow passage, which makes the outlet side switching valve and a mixed gas flow passage in the manifold communicate with one another.

摘要翻译： 混合气体供给装置包括并列布置的多个气体供给管线，包括流量控制装置和出口侧切换阀，其中各个出口侧切换阀的气体出口与歧管连通，另一个气体供给管线位于关闭位置 到歧管的混合气体出口供给低流量气体，其中流量控制装置的出口侧和出口侧切换阀的入口侧经由流量控制装置的出口侧连接配件气密地连接 以及具有气体通道的安装台，其中在出口侧连接配件和/或流路的流路的一部分处设置有小孔部，其使出口侧切换阀和混合气体流路成为 歧管彼此通信。

公开(公告)号：US20120241023A1

公开(公告)日：2012-09-27

申请号：US13508448

申请日：2010-10-29

申请人： Nobukazu Ikeda ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Hiroshi Kaneko ,  Yasushi Yagi ,  Yuji Ono ,  Tadahiro Ohmi ,  Yasuyuki Shirai

发明人： Nobukazu Ikeda ,  Michio Yamaji ,  Tsuyoshi Tanikawa ,  Hiroshi Kaneko ,  Yasushi Yagi ,  Yuji Ono ,  Tadahiro Ohmi ,  Yasuyuki Shirai

IPC分类号： F16K31/128 ,  F16K1/34

CPC分类号： F16K31/126 ,  F16K1/34 ,  F16K25/005 ,  Y10T137/776

摘要： A control valve device develops opening/closing accuracy of a valve assembly. The valve head 310a is configured to open and close a transfer path formed in the valve housing 305 by transmitting the power to the valve assembly 310 from the power transmission member according to a pressure ratio between working fluid supplied to the first space Us and the second space Ls, respectively. The valve head has a Vickers hardness larger than a Vickers hardness of a valve seat of the transfer path to be in contact with the valve head, and a hardness difference therebetween is set to be about 200 Hv to about 300 Hv.

摘要翻译： 控制阀装置产生阀组件的开/关精度。 阀头310a被构造成通过根据供应到第一空间Us的工作流体与第二空间的第二压力之间的压力比将从动力传递构件传递到阀组件310的动力来打开和关闭形成在阀壳体305中的传送路径 空间Ls。 阀头的维氏硬度大于与阀头接触的传送路径的阀座的维氏硬度，并且其间的硬度差设定为约200Hv至约300Hv。

公开(公告)号：US08246087B1

公开(公告)日：2012-08-21

申请号：US09437296

申请日：1999-11-09

申请人： Michio Yamaji ,  Tsutomu Shinohara ,  Nobukazu Ikeda

发明人： Michio Yamaji ,  Tsutomu Shinohara ,  Nobukazu Ikeda

IPC分类号： F16L17/00

CPC分类号： F16L23/16

摘要： Coupling members each have a fluid channel having an opening passageway orthogonal to an abutting end face of the coupling member, and a slanting main passageway communicating with the opening passageway. The opening passageway has diameter equal to the inside diameter of a gasket holding annular ridge of the coupling member. A gasket has an inside diameter smaller than the diameter of the opening passageway.

摘要翻译： 联接构件各自具有流体通道，其具有与联接构件的邻接端面正交的开口通道，以及与开口通道连通的倾斜主通道。 开口通道的直径等于连接构件的保持环形脊的垫圈的内径。 垫圈的内径小于开口通道的直径。