发明申请
- 专利标题: THIN FILM TRANSISTOR
- 专利标题(中): 薄膜晶体管
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申请号: US13489458申请日: 2012-06-06
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公开(公告)号: US20120241743A1公开(公告)日: 2012-09-27
- 发明人: Guang-Ren Shen , Pei-Ming Chen , Chun-Hsiun Chen , Wei-Ming Huang
- 申请人: Guang-Ren Shen , Pei-Ming Chen , Chun-Hsiun Chen , Wei-Ming Huang
- 申请人地址: TW Hsinchu
- 专利权人: AU OPTRONICS CORPORATION
- 当前专利权人: AU OPTRONICS CORPORATION
- 当前专利权人地址: TW Hsinchu
- 优先权: TW99106133 20100303
- 主分类号: H01L29/786
- IPC分类号: H01L29/786
摘要:
A thin film transistor (TFT) and a fabricating method thereof are provided. The TFT includes a channel layer, an ohmic contact layer, a dielectric layer, a source, a drain, a gate, and a gate insulating layer. The channel layer has an upper surface and a sidewall. The ohmic contact layer is disposed on a portion of the upper surface of the channel layer. The dielectric layer is disposed on the sidewall of the channel layer, and does not overlap with the ohmic contact layer. The source and the drain are disposed on portions of the ohmic contact layer and the dielectric layer. A portion of dielectric layer is not covered by the source or the drain. The gate is above or below the channel layer. The gate insulating layer is disposed between the gate and the channel layer.
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