发明申请
- 专利标题： METHOD OF MANUFACTURING MULTILAYER FILM
- 专利标题（中）： 制造多层膜的方法
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申请号： US13226960申请日： 2011-09-07
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公开(公告)号： US20120244640A1公开(公告)日： 2012-09-27
- 发明人: Yuichi OHSAWA , Shigeki Takahashi , Junichi Ito , Daisuke Saida , Kyoichi Suguro , Hiroaki Yoda
- 申请人： Yuichi OHSAWA , Shigeki Takahashi , Junichi Ito , Daisuke Saida , Kyoichi Suguro , Hiroaki Yoda
- 优先权： JP2011-063285 20110322
- 主分类号： H01L43/12
- IPC分类号： H01L43/12
摘要：
According to one embodiment, a method of manufacturing a multilayer film, the method includes forming a first layer, forming a second layer on the first layer, and transcribing a crystal information of one of the first and second layers to the other one of the first and second layers by executing a GCIB-irradiation to the second layer.
公开/授权文献
- US09082961B2 Method of manufacturing multilayer film 公开/授权日：2015-07-14