发明申请
US20120251930A1 PHOTOMASK BLANK AND METHOD FOR MANUFACTURING PHOTOMASK 有权
PHOTOMASK BLANK及其制造方法

PHOTOMASK BLANK AND METHOD FOR MANUFACTURING PHOTOMASK
摘要:
According to one embodiment, a photomask blank wherein a second film is stacked on a first film, the first film containing chromium and which is not substantially etched by the dry etching using fluorine and which is etchable by the dry etching using oxygen-containing chlorine, and the second film containing no chromium and which is etchable by dry etching using fluorine and dry etching using oxygen-containing chlorine.
公开/授权文献
信息查询
0/0