发明申请
- 专利标题： VARIABLE RESISTANCE ELEMENT AND MANUFACTURING METHOD THEREOF
- 专利标题（中）： 可变电阻元件及其制造方法
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申请号： US13515761申请日： 2010-12-14
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公开(公告)号： US20120252184A1公开(公告)日： 2012-10-04
- 发明人: Takeki Ninomiya , Yoshio Kawashima , Yukio Hayakawa , Takumi Mikawa
- 申请人： Takeki Ninomiya , Yoshio Kawashima , Yukio Hayakawa , Takumi Mikawa
- 优先权： JP2009-287685 20091218
- 国际申请： PCT/JP2010/007250 WO 20101214
- 主分类号： H01L21/8239
- IPC分类号： H01L21/8239
摘要：
A variable resistance element comprises, when M is a transition metal element, O is oxygen, and x and y are positive numbers satisfying y>x; a lower electrode; a first oxide layer formed on the lower electrode and comprising MOx when a content ratio of O with respect to M is x; a second oxide layer formed on the first oxide layer and comprising MOy when a content ratio of O with respect to M is y; an upper electrode formed on the second oxide layer; a protective layer formed on the upper electrode and comprising an electrically conductive material having a composition different from a composition of the upper electrode; an interlayer insulating layer formed to cover the protective layer; and an upper contact plug formed inside an upper contact hole penetrating the interlayer insulating layer.
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