发明申请
- 专利标题： Method of protecting a radiation detector in a charged particle instrument
- 专利标题（中）： 保护带电粒子仪器中的辐射探测器的方法
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申请号： US13441344申请日： 2012-04-06
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公开(公告)号： US20120256085A1公开(公告)日： 2012-10-11
- 发明人: Maximus Theodorus Otten , Gerrit Cornelis van Hoften , Joeri Lof
- 申请人： Maximus Theodorus Otten , Gerrit Cornelis van Hoften , Joeri Lof
- 申请人地址： US OR Hillsboro
- 专利权人： FEI Company
- 当前专利权人： FEI Company
- 当前专利权人地址： US OR Hillsboro
- 优先权： EP11161427.7 20110407
- 主分类号： H01J37/26
- IPC分类号： H01J37/26
摘要：
The invention relates to a Method of protecting a direct electron detector (151) in a TEM. The invention involves predicting the current density on the detector before setting new beam parameters, such as changes to the excitation of condenser lenses (104), projector lenses (106) and/or beam energy. The prediction is made using an optical model or a Look-Up-Table. When the predicted exposure of the detector is less than a predetermined value, the desired changes are made, otherwise a warning message is generated and changes to the settings are postponed.
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