发明申请
- 专利标题: OPTOELECTRONIC DEVICE AND THE MANUFACTURING METHOD THEREOF
- 专利标题(中): 光电器件及其制造方法
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申请号: US13528059申请日: 2012-06-20
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公开(公告)号: US20120256164A1公开(公告)日: 2012-10-11
- 发明人: Shih-I Chen , Chia-Liang Hsu , Tzu-Chieh Hsu , Chun-Yi Wu , Chien-Fu Huang
- 申请人: Shih-I Chen , Chia-Liang Hsu , Tzu-Chieh Hsu , Chun-Yi Wu , Chien-Fu Huang
- 主分类号: H01L33/06
- IPC分类号: H01L33/06
摘要:
An optoelectronic device has a substrate and a first window layer on the substrate with a first sheet resistance, a first thickness, and a first impurity concentration. A second window layer has a second sheet resistance, a second thickness, and a second impurity concentration. A semiconductor system is between the first window layer and the second window layer. The second window layer has a semiconductor material different from the semiconductor system, and the second sheet resistance is greater than the first sheet resistance. A method for manufacturing is provided, having the steps of providing a substrate, forming a semiconductor system on the substrate, and forming a window layer on the semiconductor system. The window layer has a semiconductor material different from the semiconductor system. Selectively removing the window layer forms a width difference greater than 1 micron between the window layer and semiconductor system.
公开/授权文献
- US08474233B2 Optoelectronic device and the manufacturing method thereof 公开/授权日:2013-07-02
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