发明申请
- 专利标题: TRANSISTOR WITH BURIED FINS
- 专利标题(中): 带有隐形金属的晶体管
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申请号: US13081509申请日: 2011-04-07
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公开(公告)号: US20120256257A1公开(公告)日: 2012-10-11
- 发明人: Tieh-Chiang Wu , Yi-Nan Chen , Hsien-Wen Liu
- 申请人: Tieh-Chiang Wu , Yi-Nan Chen , Hsien-Wen Liu
- 主分类号: H01L29/772
- IPC分类号: H01L29/772
摘要:
The present invention disclosed a recessed gate transistor with buried fins. The recessed gate transistor with buried fins is disposed in an active region on a semiconductor substrate. Two isolation regions disposed in the semiconductor substrate, and sandwich the active region. A gate structure is disposed in the semiconductor substrate, wherein the gate structure includes: an upper part and a lower part. The upper part is disposed in the active region and a lower part having a front fin disposed in one of the two isolation regions, at least one middle fin disposed in the active region, and a last fin disposed in the other one of the two isolation regions, wherein the front fin are both elliptic cylindrical.
公开/授权文献
- US08525262B2 Transistor with buried fins 公开/授权日:2013-09-03
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