Invention Application
- Patent Title: MEMS RESONATOR AND METHOD OF CONTROLLING THE SAME
- Patent Title (中): MEMS谐振器及其控制方法
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Application No.: US13446398Application Date: 2012-04-13
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Publication No.: US20120262241A1Publication Date: 2012-10-18
- Inventor: Kim Phan Le , Peter Gerard Steeneken , Jozef Thomas Martinus VAN BEEK
- Applicant: Kim Phan Le , Peter Gerard Steeneken , Jozef Thomas Martinus VAN BEEK
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP11162591.9 20110415
- Main IPC: H03B5/30
- IPC: H03B5/30
Abstract:
A MEMS resonator has a component which provides a capacitance associated with the transduction gap which has a temperature-dependent dielectric characteristic, which varies in the same direction (i.e. the slope has the same sign) as the Young's modulus of the material of the resonator versus temperature. This means that the resonant frequency is less dependent on temperature.
Public/Granted literature
- US08803623B2 MEMS resonator and method of controlling the same Public/Granted day:2014-08-12
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