发明申请
US20120262794A1 OPTICAL ELEMENT AND OPTICAL SYSTEM 审中-公开
光学元件和光学系统

OPTICAL ELEMENT AND OPTICAL SYSTEM
摘要:
The optical element includes a base member configured to have an optical surface, a concave-convex structure configured to have an average pitch smaller than a shortest wavelength of a use wavelength range, and an intermediate layer formed between the optical surface and the concave-convex structure, made of a material different from that of the concave-convex structure, and having a refractive index between those of the base member and the material of the concave-convex structure. The optical surface is formed into a shape having a rotational symmetry axis. A thickness of the intermediate layer or each of thicknesses of the intermediate layer and the concave-convex structure varies so as to increase as a distance from the rotational symmetry axis increases. The optical element has good anti-reflection performance not only at a central part of the optical surface having a small curvature radius but also at a peripheral part thereof.
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