发明申请
- 专利标题: INTEGRATED CIRCUIT STRUCTURE INCLUDING A COPPER-ALUMINUM INTERCONNECT AND METHOD FOR FABRICATING THE SAME
- 专利标题(中): 一体化电路结构,包括铜铝互连及其制造方法
-
申请号: US13094944申请日: 2011-04-27
-
公开(公告)号: US20120273948A1公开(公告)日: 2012-11-01
- 发明人: Kuo Hui Su , Yi Nan Chen , Hsien Wen Liu
- 申请人: Kuo Hui Su , Yi Nan Chen , Hsien Wen Liu
- 申请人地址: TW Kueishan
- 专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人地址: TW Kueishan
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L21/768
摘要:
An integrated circuit structure including a copper-aluminum interconnect with a barrier layer including a titanium nitride layer and a method for fabricating the same are disclosed. The method for fabricating an integrated circuit structure including a copper-aluminum interconnect according to the present invention comprises the steps of providing a copper (Cu) layer; forming a barrier layer connected to the copper layer, wherein the barrier layer comprises a first layer including a tantalum layer and a tantalum nitride layer and a second layer including a titanium nitride layer, the first layer contacts the copper layer and is disposed between the copper layer and the second layer, and the barrier layer has a recess correspondingly above the copper layer; and forming an aluminum (Al) layer disposed in the recess.
信息查询
IPC分类: