发明申请
- 专利标题： SURFACE MEASUREMENT INSTRUMENT AND METHOD
- 专利标题（中）： 表面测量仪器和方法
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申请号： US13504214申请日： 2010-11-01
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公开(公告)号： US20120278035A1公开(公告)日： 2012-11-01
- 发明人: Paul James Scott
- 申请人： Paul James Scott
- 申请人地址： GB Leicester, Leicestershire
- 专利权人： Taylor Hobson Limited
- 当前专利权人： Taylor Hobson Limited
- 当前专利权人地址： GB Leicester, Leicestershire
- 优先权： GB0919069.5 20091030; GB1001398.5 20100128
- 国际申请： PCT/GB2010/051829 WO 20101101
- 主分类号： G06F15/00
- IPC分类号： G06F15/00
摘要：
A method of characterising the surface of an aspheric diffractive structure includes using a metrological apparatus to perform a measurement on the surface of the structure so as to provide a measurement profile representing the z-direction deviations of the surface of the structure; determining parameters relating to the aspheric and diffractive components of the aspheric diffractive structure; producing data having the determined parameters; and comparing the produced data with the measurement profile to determine residual error data.
公开/授权文献
- US10444000B2 Surface measurement instrument and method 公开/授权日：2019-10-15
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