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公开(公告)号：US10533833B2
公开(公告)日：2020-01-14
申请号：US15309012
申请日：2015-04-27
发明人： Shaojun Xiao
摘要： A method for characterising instrument error in a surface measurement instrument, comprising obtaining first calibration measurement data representing a known surface form of a first reference object and obtaining second calibration measurement data representing a known surface form of a second reference object. At least a portion of the second calibration measurement data represents a measurement range that overlaps with at least a portion of a measurement range of the first calibration measurement data. A common error function is obtained that characterises the instrument error.
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公开(公告)号：US10444000B2
公开(公告)日：2019-10-15
申请号：US13504214
申请日：2010-11-01
申请人： Paul James Scott
发明人： Paul James Scott
摘要： A method of characterizing the surface of an aspheric diffractive structure includes using a metrological apparatus to perform a measurement on the surface of the structure so as to provide a measurement profile representing the z-direction deviations of the surface of the structure; determining parameters relating to the aspheric and diffractive components of the aspheric diffractive structure; producing data having the determined parameters; and comparing the produced data with the measurement profile to determine residual error data.
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公开(公告)号：US09322631B2
公开(公告)日：2016-04-26
申请号：US13581900
申请日：2011-03-01
申请人： Paul J. Scott
发明人： Paul J. Scott
摘要： A method of calibrating a surface measurement instrument includes rotating a work piece having an undulating surface on a turntable of a metrological apparatus; measuring the surface of the work piece at a plurality of rotational positions; analyzing the results of the measurement to determine parameters describing an error causing characteristic of the metrological apparatus; and using the determined parameters to correct measurement data for the error causing characteristic of the metrological apparatus.
摘要翻译： 校准表面测量仪器的方法包括将具有起伏表面的工件旋转在计量装置的转盘上; 在多个旋转位置测量所述工件的表面; 分析测量结果以确定描述计量装置特征引起的误差的参数; 并且使用所确定的参数来校正测量数据，用于计量装置的引起特征的误差。
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公开(公告)号：US08543353B2
公开(公告)日：2013-09-24
申请号：US13352687
申请日：2012-01-18
申请人： Daniel Ian Mansfield
发明人： Daniel Ian Mansfield
IPC分类号： G01B5/02
CPC分类号： G01B9/02083 , G01B9/02057 , G01B9/02084 , G01B9/0209 , G01B11/0675 , G01B11/303
摘要： Light reflected by a sample surface region and a reference surface interfere. A detector senses light intensity at intervals during relative movement along a scan path between the sample surface and the reference surface to provide a series of intensity values representing interference fringes. A data processor receives first intensity data including a first series of intensity values resulting from a measurement operation on a surface area of a substrate and second intensity data including a second series of intensity values resulting from a measurement operation on a surface area of a thin film structure. A gain is determined for each thin film of the thin film structure. Substrate and apparent thin film structure surface characteristics are determined on the basis of the first and second intensity data, respectively. The apparent thin film structure surface characteristic is modified using the substrate surface characteristic and the determined gain or gains.
摘要翻译： 由样品表面区域和参考表面反射的光线干涉。 检测器在沿着样品表面和参考表面之间的扫描路径的相对移动期间间隔地感测光强度，以提供表示干涉条纹的一系列强度值。 数据处理器接收第一强度数据，该第一强度数据包括由衬底的表面区域上的测量操作产生的第一系列强度值，以及包括由薄膜表面积上的测量操作产生的第二系列强度值的第二强度数据 结构体。 为薄膜结构的每个薄膜确定增益。 基于第一和第二强度数据确定基板和表观薄膜结构表面特性。 使用基板表面特性和确定的增益或增益来修改表观薄膜结构表面特性。
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公开(公告)号：US08239163B2
公开(公告)日：2012-08-07
申请号：US13116541
申请日：2011-05-26
申请人： Daniel Ian Mansfield
发明人： Daniel Ian Mansfield
CPC分类号： G01B9/02084 , G01B9/02057 , G01B9/02089 , G01B9/0209 , G01B9/04 , Y10T29/49124
摘要： A coherence scanning interferometer carries out: a coherence scanning measurement operation on a surface area using a low numeric aperture objective so that the pitch of the surface structure elements is less that the spread of the point spread function at the surface to obtain structure surface intensity data; and a coherence scanning measurement operation on a non-structure surface area to obtain non-structure surface intensity data. A frequency transform ratio determiner determines a frequency transform ratio related to the ratio between the structure surface intensity data and the non-structure surface intensity data. A structure provider sets that frequency transform ratio equal to an expression representing the electric field at the image plane of the interferometer in terms of surface structure element size (height or depth) and width-to-pitch ratio and derives the surface structure element size and width-to-pitch ratio using the frequency transform ratio.
摘要翻译： 相干扫描干涉仪执行：使用低数值孔径物镜在表面区域上的相干扫描测量操作，使得表面结构元件的间距小于表面处的点扩散函数的扩展以获得结构表面强度数据 ; 以及对非结构表面区域的相干扫描测量操作，以获得非结构表面强度数据。 变频比确定器确定与结构表面强度数据和非结构表面强度数据之间的比率相关的频率变换比。 结构提供者根据表面结构元素尺寸（高度或深度）和宽度与间距比将该变换率设置为等于干涉仪的像面处的电场的表达式，并导出表面结构元件尺寸和 宽度与间距比使用频率变换比。
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公开(公告)号：US20120004888A1
公开(公告)日：2012-01-05
申请号：US13116541
申请日：2011-05-26
申请人： Daniel Ian Mansfield
发明人： Daniel Ian Mansfield
CPC分类号： G01B9/02084 , G01B9/02057 , G01B9/02089 , G01B9/0209 , G01B9/04 , Y10T29/49124
摘要： A coherence scanning interferometer carries out: a coherence scanning measurement operation on a surface area using a low numeric aperture objective so that the pitch of the surface structure elements is less that the spread of the point spread function at the surface to obtain structure surface intensity data; and a coherence scanning measurement operation on a non-structure surface area to obtain non-structure surface intensity data. A frequency transform ratio determiner determines a frequency transform ratio related to the ratio between the structure surface intensity data and the non-structure surface intensity data. A structure provider sets that frequency transform ratio equal to an expression representing the electric field at the image plane of the interferometer in terms of surface structure element size (height or depth) and width-to-pitch ratio and derives the surface structure element size and width-to-pitch ratio using the frequency transform ratio.
摘要翻译： 相干扫描干涉仪执行：使用低数值孔径物镜在表面区域上的相干扫描测量操作，使得表面结构元件的间距小于表面处的点扩散函数的扩展以获得结构表面强度数据 ; 以及对非结构表面区域的相干扫描测量操作，以获得非结构表面强度数据。 变频比确定器确定与结构表面强度数据和非结构表面强度数据之间的比率相关的频率变换比。 结构提供者根据表面结构元素尺寸（高度或深度）和宽度与间距比将该变换率设置为等于干涉仪的像面处的电场的表达式，并导出表面结构元件尺寸和 宽度与间距比使用频率变换比。
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公开(公告)号：US07877227B2
公开(公告)日：2011-01-25
申请号：US12162728
申请日：2007-02-09
IPC分类号： G01B11/24
CPC分类号： G01B11/303 , G01B9/02057 , G01B9/0209 , G01B2290/65
摘要： A surface measurement instrument (1) for obtaining surface characteristic data of a sample surface (13) is described. Relative movement between a reference surface (11) and a sample support (15) is caused to occur while a sensor (16) senses light intensity at intervals along a scan path (SP) to provide a series of intensity values representing interference fringes produced by a region of a sample surface (13) during said relative movement and from which series of intensity values surface characteristic data can be derived. The sample support (15) is both translatable and tiltable in at least one direction perpendicular to a scan direction so that the sample support (15) can be both tilted to cause the scan path (SP) to be normal to the sample surface region and translated to compensate for translation movement due to the tilting.
摘要翻译： 描述了用于获得样品表面（13）的表面特性数据的表面测量仪器（1）。 当传感器（16）沿着扫描路径（SP）以间隔感测光强度时，引起参考表面（11）和样品支架（15）之间的相对运动，以提供一系列强度值，表示由 在所述相对移动期间的样品表面（13）的区域，并且可以从其导出一系列强度值表面特征数据。 样品支撑件（15）在垂直于扫描方向的至少一个方向上是可平移的和可倾斜的，使得样品支撑件（15）可以倾斜以使得扫描路径（SP）垂直于样品表面区域，并且 翻译为补偿由于倾斜引起的翻译运动。
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8.发明授权Interferometer system for and a method of determining a surface characteristic by modifying surface height data using corresponding amplitude data 失效干涉仪系统和通过使用对应的振幅数据修改表面高度数据来确定表面特性的方法公开(公告)号：US07697726B2
公开(公告)日：2010-04-13
申请号：US11260072
申请日：2005-10-26
IPC分类号： G06K9/00
CPC分类号： G01B11/2441
摘要： An interferometer system (2) directs light along a sample path (SP) towards a sample surface (7) and along a reference path (RP) towards a reference surface (6). Light reflected by a sample surface region and by the reference surface interfere. Sensing elements (SE) sense interference fringes at intervals along a scan path to provide a set of intensity data. A coherence peak position determiner (201) determines from the intensity data set a position on the scan path that corresponds to the height of the surface region. An amplitude determiner (202) determines amplitude data representing the amplitude of the intensity data at the determined height position. A modified surface height calculator (207) calculates modified height data by modifying the height data by a correction factor determined using the corresponding amplitude data and a correction parameter provided by a correction parameter provider (260).
摘要翻译： 干涉仪系统（2）沿着样本路径（SP）将光沿着参考路径（RP）朝向参考表面（6）引导到样本表面（7）并沿着参考路径（RP）。 由样品表面区域和参考面反射的光线干涉。 感测元件（SE）沿着扫描路径间隔地感测干涉条纹以提供一组强度数据。 相干峰位置确定器（201）根据强度数据设置与扫描路径上对应于表面区域的高度的位置。 振幅确定器（202）确定表示所确定的高度位置处的强度数据的振幅的振幅数据。 经修改的表面高度计算器（207）通过使用由对应的幅度数据确定的校正因子和由校正参数提供者（260）提供的校正参数来修改高度数据来计算修改的高度数据。
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9.发明授权System and method for detecting the angle of a light beam using a mask with a transmissivity pattern 失效使用具有透射率图案的掩模来检测光束的角度的系统和方法
公开(公告)号：US5579108A
公开(公告)日：1996-11-26
申请号：US318762
申请日：1994-10-14
申请人： Chung W. See
发明人： Chung W. See
摘要： A system for measuring the angle of a beam of light is arranged so that a periodically varying pattern is formed on a photodetector, with a waveform property such as wavelength or phase of the pattern varying with the angle of the light. This may be done by creating interference between the light beam to be measured and a reference light beam having a fixed angle, or by forming a shadow on the detector array of one or more masks having a periodically varying transmission characteristic. One convenient way of processing the output of the photodetector array is to perform a fast Fourier transform, obtain therefrom one or more spatial frequency components, and extract therefrom a part which provides a measure of the angle of the light beam. The use of a periodically varying pattern on the photodetector array enables a substantial length of the array to be used in any particular measurement operation, and averages out individual performance differences between different elements of the photodetector array. The use of waveform properties enables convenient signal processing to be carried out, for example using well known fast Fourier transform techniques.
摘要翻译： PCT No.PCT / GB93 / 00790 Sec。 371日期：1994年10月14日 102（e）日期1994年10月14日PCT提交1993年4月15日PCT公布。 公开号WO93 / 21496 日期：1993年10月28日布置了用于测量光束角度的系统，使得在光电检测器上形成周期性变化的图案，其中波形特性如图案的波长或相位随光的角度而变化。 这可以通过在要测量的光束和具有固定角度的参考光束之间产生干涉，或者通过在具有周期性变化的透射特性的一个或多个掩模的检测器阵列上形成阴影来实现。 处理光电检测器阵列的输出的一种方便的方法是执行快速傅里叶变换，从中获得一个或多个空间频率分量，并从其中提取提供光束角度测量的部分。 在光电检测器阵列上使用周期性变化的图案使得能够在任何特定的测量操作中使用该阵列的相当长的长度，并平均光电检测器阵列的不同元件之间的各个性能差异。 使用波形属性可以实现方便的信号处理，例如使用公知的快速傅里叶变换技术。
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公开(公告)号：US5572798A
公开(公告)日：1996-11-12
申请号：US256324
申请日：1995-07-08
申请人： Anthony B. Barnaby
发明人： Anthony B. Barnaby
CPC分类号： G01B5/0009
摘要： A metrological apparatus has a movable arm 15 which moves up and down between two bearing members 13, both of which define datum positions for the arm 15. The arm 15 has air bearings on the bearing members 13, so that it adopts a position equidistant between the bearing members 13. In this way, the position of the arm 15 contains the average of the errors in the two datum positions defined by the bearing members 13. Where the bearing members 13 have symmetric errors, these will be cancelled. Since the path of maximum straightness of movement of the arm 15 is spaced from the bearing members 13, it is possible to put a workpiece 3 in this path and a turntable 5 for supporting the workpiece 3 is arranged to have its rotational axis in line with the path of maximum straightness. The vertical position of each end of the arm 15 is measured using a respective grating 25 and the average of the measurements is taken to provide an accurate measurement of the height of the centre point of the arm 15 over the workpiece 3, substantially free of Abbe errors.
摘要翻译： PCT No.PCT / GB93 / 00037 Sec。 371日期：1994年7月8日 102（e）日期1994年7月8日PCT提交1993年1月8日PCT公布。 出版物WO93 / 14367 日期1993年7月22日计量装置具有可移动臂15，该可动臂15在两个轴承构件13之间上下移动，两个轴承构件均限定了臂15的基准位置。臂15在轴承构件13上具有空气轴承， 在轴承构件13之间采用等距离的位置。这样，臂15的位置包含由轴承构件13限定的两个基准位置中的误差的平均值。当轴承构件13具有对称误差时，这些将是 取消。 由于臂15的最大平直度的运动路径与轴承构件13间隔开，因此可以将工件3放置在该路径中，并且用于支撑工件3的转台5被布置成使其旋转轴线与 最大直线的路径。 使用相应的光栅25测量臂15的每个端部的垂直位置，并且采用测量的平均值来提供臂15在工件3上的中心点的高度的精确测量，基本上不含Abb + E，acu e + EE错误。
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