发明申请
US20120280706A1 CLEANING SHEET, CLEANING MEMBER, CLEANING METHOD, AND CONTINUITY TEST APPARATUS
审中-公开
清洁表，清洁会员，清洁方法和连续测试装置
- 专利标题： CLEANING SHEET, CLEANING MEMBER, CLEANING METHOD, AND CONTINUITY TEST APPARATUS
- 专利标题（中）： 清洁表，清洁会员，清洁方法和连续测试装置
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申请号： US13464861申请日： 2012-05-04
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公开(公告)号： US20120280706A1公开(公告)日： 2012-11-08
- 发明人: Daisuke Uenda , Makoto Namikawa , Takeshi Matsumura
- 申请人： Daisuke Uenda , Makoto Namikawa , Takeshi Matsumura
- 申请人地址： JP Osaka
- 专利权人： C/O NITTO DENKO CORPORATION
- 当前专利权人： C/O NITTO DENKO CORPORATION
- 当前专利权人地址： JP Osaka
- 优先权： JP2011-103384 20110506
- 主分类号： G01R1/067
- IPC分类号： G01R1/067 ; B08B1/00 ; A47L25/00 ; A47L13/10
摘要：
Provided is a cleaning unit for removing foreign matter adhering to a probe needle of a probe card for a continuity test, the cleaning unit being capable of effectively removing the foreign matter adhering to the probe needle without abrading the probe needle. A cleaning sheet of the present invention is a cleaning sheet, including a cleaning layer for removing foreign matter adhering to a probe needle of a probe card for a continuity test, in which the cleaning layer has an arithmetic average roughness Ra in conformity with JIS-B-0601 of 100 nm or less.
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