发明申请
US20120281975A1 SURFACE HEATING DEVICE FOR A SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT DEVICE
有权
用于基板处理装置和基板处理装置的表面加热装置
- 专利标题： SURFACE HEATING DEVICE FOR A SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT DEVICE
- 专利标题（中）： 用于基板处理装置和基板处理装置的表面加热装置
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申请号： US13119121申请日： 2010-08-23
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公开(公告)号： US20120281975A1公开(公告)日： 2012-11-08
- 发明人: Michael Hentschel , Thomas Meyer , Hubertus Von Der Waydbrink , Marco Kenne , Daniel Stange , Hans-Christian Hecht
- 申请人： Michael Hentschel , Thomas Meyer , Hubertus Von Der Waydbrink , Marco Kenne , Daniel Stange , Hans-Christian Hecht
- 申请人地址： DE Dresden
- 专利权人： VON ARDENNE ANLAGENTECHNIK GMBH
- 当前专利权人： VON ARDENNE ANLAGENTECHNIK GMBH
- 当前专利权人地址： DE Dresden
- 优先权： DE102009038341.7 20090821
- 国际申请： PCT/EP2010/062264 WO 20100823
- 主分类号： H05B3/48
- IPC分类号： H05B3/48 ; H05B1/00
摘要：
A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane.
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