发明申请
- 专利标题: RUTHENIUM FILM-FORMING MATERIAL AND RUTHENIUM FILM-FORMING METHOD
- 专利标题(中): 形成薄膜的成膜材料和成膜方法
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申请号: US13503899申请日: 2010-10-20
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公开(公告)号: US20120282414A1公开(公告)日: 2012-11-08
- 发明人: Ryuichi Saito , Kang-go Chung , Hideki Nishimura , Tatsuya Sakai
- 申请人: Ryuichi Saito , Kang-go Chung , Hideki Nishimura , Tatsuya Sakai
- 申请人地址: JP Tokyo
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-248383 20091029; JP2010-099416 20100423
- 国际申请: PCT/JP2010/068490 WO 20101020
- 主分类号: C07F15/00
- IPC分类号: C07F15/00 ; B05D3/02 ; B05D3/06 ; B05D7/24
摘要:
Disclosed is a ruthenium film-forming material having a lower melting point and a higher vapor pressure that facilitates supply of the material onto a base and moreover enables a high-quality ruthenium film to be obtained.A ruthenium film-forming material includes a compound represented by general formula (1) below (wherein R1 is independently at each occurrence a hydrogen atom, a halogen atom, a hydrocarbon group having 1 to 4 carbon atoms or a halogenated hydrocarbon group having 1 to 4 carbon atoms; R2 is independently at each occurrence a halogenated hydrocarbon group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms or a halogenated alkoxy group having 1 to 4 carbon atoms, with the proviso that R1 and R2 are mutually differing groups; R3 is independently at each occurrence a hydrogen atom or a hydrocarbon group having 1 to 4 carbon atoms; and L is an unsaturated hydrocarbon compound having 4 to 10 carbon atoms and having at least two double bonds).
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