发明申请
- 专利标题: POSITIVE RESIST COMPOSITION AND METHOD FOR PRODUCING MICROLENS
- 专利标题(中): 积极抵抗组合物和生产微生物的方法
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申请号: US13574938申请日: 2011-01-19
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公开(公告)号: US20120292487A1公开(公告)日: 2012-11-22
- 发明人: Shojiro Yukawa , Shinya Arase , Toshiaki Takeyama , Yuki Endo , Takeo Moro
- 申请人: Shojiro Yukawa , Shinya Arase , Toshiaki Takeyama , Yuki Endo , Takeo Moro
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-014505 20100126
- 国际申请: PCT/JP2011/050854 WO 20110119
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; H01L27/146 ; G03F7/20
摘要:
There is provided a resist composition suitable for forming a microlens which is excellent in transparency, heat resistance, and sensitivity characteristics, excellent in solubility in a developer, and as the result thereof has high resolution. A positive resist composition comprising; a component (A): an alkali-soluble polymer; a component (B): a compound having an organic group to be photolyzed to generate an alkali-soluble group; a component (C): a crosslinkable compound of Formula (1): [where R1, R2, and, R3 are independently a C1-6 alkylene group or oxyalkylene group which are optionally branched; and E1, E2, and E3 are independently a group containing a structure of Formula (2) or Formula (3): (where R4 is a hydrogen atom or a methyl group)]; and a component (D): a solvent.
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