发明申请
- 专利标题: Dual Cavity Etch for Embedded Stressor Regions
- 专利标题(中): 嵌入式应力区域的双腔蚀刻
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申请号: US13109134申请日: 2011-05-17
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公开(公告)号: US20120292637A1公开(公告)日: 2012-11-22
- 发明人: Sven Beyer , Peter Baars , Jan Hoentschel , Thilo Scheiper
- 申请人: Sven Beyer , Peter Baars , Jan Hoentschel , Thilo Scheiper
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/336 ; H01L21/8238 ; H01L21/20
摘要:
Generally, the present disclosure is directed to methods for forming embedded stressor regions in semiconductor devices such as transistor elements and the like. One illustrative method disclosed herein includes forming a first material in first cavities formed in a first active area adjacent to a first channel region of a semiconductor device, wherein the first material induces a first stress in the first channel region. The method also includes, among other things, forming a second material in second cavities formed in a second active area adjacent to a second channel region of the semiconductor device, wherein the second material induces a second stress in the second channel region that is of an opposite type of the first stress in the first channel region, and wherein the first and second cavities are formed during a common etch process.
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