发明申请
US20120292738A1 Semiconductor Device and Method of Forming an IPD over a High-Resistivity Encapsulant Separated from other IPDS and Baseband Circuit
有权
半导体器件和在与其他IPDS和基带电路分离的高电阻率密封剂上形成IPD的方法
- 专利标题: Semiconductor Device and Method of Forming an IPD over a High-Resistivity Encapsulant Separated from other IPDS and Baseband Circuit
- 专利标题(中): 半导体器件和在与其他IPDS和基带电路分离的高电阻率密封剂上形成IPD的方法
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申请号: US13569105申请日: 2012-08-07
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公开(公告)号: US20120292738A1公开(公告)日: 2012-11-22
- 发明人: Yaojian Lin , Jianmin Fang , Kang Chen , Haijing Cao
- 申请人: Yaojian Lin , Jianmin Fang , Kang Chen , Haijing Cao
- 申请人地址: SG Singapore
- 专利权人: STATS CHIPPAC, LTD.
- 当前专利权人: STATS CHIPPAC, LTD.
- 当前专利权人地址: SG Singapore
- 主分类号: H01L27/06
- IPC分类号: H01L27/06
摘要:
A semiconductor device has a first conductive layer formed over a sacrificial substrate. A first integrated passive device (IPD) is formed in a first region over the first conductive layer. A conductive pillar is formed over the first conductive layer. A high-resistivity encapsulant greater than 1.0 kohm-cm is formed over the first IPD to a top surface of the conductive pillar. A second IPD is formed over the encapsulant. The first encapsulant has a thickness of at least 50 micrometers to vertically separate the first and second IPDs. An insulating layer is formed over the second IPD. The sacrificial substrate is removed and a second semiconductor die is disposed on the first conductive layer. A first semiconductor die is formed in a second region over the substrate. A second encapsulant is formed over the second semiconductor die and a thermally conductive layer is formed over the second encapsulant.
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