发明申请
- 专利标题： MEMS Microphone
- 专利标题（中）： MEMS麦克风
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申请号： US13325488申请日： 2011-12-14
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公开(公告)号： US20120294464A1公开(公告)日： 2012-11-22
- 发明人: Rui Zhang , Lin-lin Wang , Zhou Ge , Xiao-lin Zhang
- 申请人： Rui Zhang , Lin-lin Wang , Zhou Ge , Xiao-lin Zhang
- 申请人地址： US CA La Verne CN Shenzhen
- 专利权人： American Audio Components Inc.,AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- 当前专利权人： American Audio Components Inc.,AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- 当前专利权人地址： US CA La Verne CN Shenzhen
- 优先权： CN201110125517.X 20110516
- 主分类号： H04R1/00
- IPC分类号： H04R1/00
摘要：
A MEMS microphone includes a silicon substrate, a diaphragm connected to the silicon substrate, a backplate opposed from the diaphragm for forming an air gap. The backplate defines a plurality of first through holes and a plurality of second through holes surrounded by the first through holes, each of the first through holes being formed by a straight boundary and an arc boundary, the radius of the second boundary being greater than half the width of the first boundary.
公开/授权文献
- US08731220B2 MEMS microphone 公开/授权日：2014-05-20
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