发明申请
- 专利标题： Laser Pulse Generation Method and Apparatus
- 专利标题（中）： 激光脉冲发生方法与装置
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申请号： US13301927申请日： 2011-11-22
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公开(公告)号： US20120298650A1公开(公告)日： 2012-11-29
- 发明人: Krzysztof Michal Nowak , Howard John Baker , Roy McBride , Jozef Jacek Wendland
- 申请人： Krzysztof Michal Nowak , Howard John Baker , Roy McBride , Jozef Jacek Wendland
- 优先权： GBGB1020246.3 20101130
- 主分类号： H01S3/10
- IPC分类号： H01S3/10 ; B23K26/08 ; B23K26/36 ; B23K26/06
摘要：
A method and apparatus of generating a laser pulse of a desired energy and micro-machining a substrate using the laser pulse. A beam of light is provided from a laser source. The beam is directed via a modulator to produce an output laser pulse with a portion of the laser pulse being used to determine the energy of the laser pulse. The modulator is controlled so as to switch off the output laser pulse when the determined energy of the output laser pulse reaches a threshold value. The output laser pulse is steered to a substrate for micro-machining.
公开/授权文献
- US09089927B2 Laser pulse generation method and apparatus 公开/授权日：2015-07-28
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