发明申请
- 专利标题： METHOD OF FABRICATION OF AN ARRAY OF GRADED REFRACTIVE INDEX MICROLENSES INTEGRATED IN A IMAGE SENSOR
- 专利标题（中）： 在图像传感器中集成的分级折射率指数微阵列的制造方法
-
申请号： US13306094申请日： 2011-11-29
-
公开(公告)号： US20120299139A1公开(公告)日： 2012-11-29
- 发明人: Giovanni Margutti , Andrea Del Monte
- 申请人： Giovanni Margutti , Andrea Del Monte
- 主分类号： H01L31/0232
- IPC分类号： H01L31/0232 ; H01L31/18
摘要：
Methods and devices that incorporate microlens arrays are disclosed. An image sensor includes a pixel layer and a dielectric layer. The pixel layer has a photodetector portion configured to convert light absorbed by the pixel layer into an electrical signal. The dielectric layer is formed on a surface of the pixel layer. The dielectric layer has a refractive index that varies along a length of the dielectric layer. A method for fabricating an image sensor includes forming an array of microlenses on a surface of the dielectric layer, emitting ions through the array of microlenses to implant the ions in the dielectric layer, and removing the array of microlenses from the surface of the dielectric layer.
公开/授权文献
信息查询
IPC分类:
