发明申请
- 专利标题: SCANNING MIRROR DEVICE
- 专利标题(中): 扫描镜反射器
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申请号: US13400504申请日: 2012-02-20
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公开(公告)号: US20120300197A1公开(公告)日: 2012-11-29
- 发明人: Stefan Richter , Veljko Milanovic , Günter Rudolph , Michel Stutz , Gerhard Krampert
- 申请人: Stefan Richter , Veljko Milanovic , Günter Rudolph , Michel Stutz , Gerhard Krampert
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS AG
- 当前专利权人: CARL ZEISS AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DE102011004477.9 20110221
- 主分类号: G01B11/26
- IPC分类号: G01B11/26
摘要:
There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.
公开/授权文献
- US08570502B2 Scanning mirror device 公开/授权日:2013-10-29
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