公开(公告)号：US20120300197A1

公开(公告)日：2012-11-29

申请号：US13400504

申请日：2012-02-20

申请人： Stefan Richter ,  Veljko Milanovic ,  Günter Rudolph ,  Michel Stutz ,  Gerhard Krampert

发明人： Stefan Richter ,  Veljko Milanovic ,  Günter Rudolph ,  Michel Stutz ,  Gerhard Krampert

IPC分类号： G01B11/26

CPC分类号： G01B11/26 ,  G02B26/105

摘要： There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.

摘要翻译： 提供了一种扫描反射镜装置，其具有围绕至少一个轴可旋转地安装的微系统扫描反射镜，以及具有发射光束的光源的检测模块和位置检测器，其中检测模块引导光束 从后面到扫描反射镜，结果是光束在扫描反射镜的后面被反射到测量反射光束的位置的位置检测器，扫描反射镜的旋转角度从该反射光束 可以推导出至少一个轴。

公开(公告)号：US08570502B2

公开(公告)日：2013-10-29

申请号：US13400504

申请日：2012-02-20

申请人： Stefan Richter ,  Veljko Milanovic ,  Günter Rudolph ,  Michel Stutz ,  Gerhard Krampert

发明人： Stefan Richter ,  Veljko Milanovic ,  Günter Rudolph ,  Michel Stutz ,  Gerhard Krampert

IPC分类号： G01B11/26

CPC分类号： G01B11/26 ,  G02B26/105

摘要： There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.

摘要翻译： 提供了一种扫描反射镜装置，其具有围绕至少一个轴可旋转地安装的微系统扫描反射镜，以及具有发射光束的光源的检测模块和位置检测器，其中检测模块引导光束 从后面到扫描反射镜，结果是光束在扫描反射镜的后面被反射到测量反射光束的位置的位置检测器，扫描反射镜的旋转角度从该反射光束 可以推导出至少一个轴。

公开(公告)号：US20120168605A1

公开(公告)日：2012-07-05

申请号：US13354541

申请日：2012-01-20

申请人： Veljko Milanovic

发明人： Veljko Milanovic

IPC分类号： G01C21/20 ,  G01C21/00

CPC分类号： G01B11/002

摘要： An optical tracking system can include at least one scanning detector having a scanning mirror and one or more fixed photo-detectors located near the scanning mirror. The scanning mirror can be configured to deflect a light beam from a source towards a retroreflective target and the photodetectors are configured to collect a portion of the light beam that is retroreflected from the target. A scanning optical detector apparatus may optionally comprise a substrate, a scanning mirror having at least one portion monolithically integrated into the substrate, and one or more photodetectors monolithically incorporated into the substrate. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the claims' scope or meaning.

摘要翻译： 光学跟踪系统可以包括至少一个具有扫描镜的扫描检测器和位于扫描反射镜附近的一个或多个固定光电检测器。 扫描反射镜可以被配置为将来自光源的光束偏转到回射目标，并且光电检测器被配置为收集从目标回射的光束的一部分。 扫描光学检测器装置可以可选地包括衬底，具有整体地集成到衬底中的至少一个部分的扫描反射镜和一体化地结合到衬底中的一个或多个光电探测器。 要强调的是，提供这个摘要是为了符合要求摘要的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交的理由是，它不会用于解释或限制索赔的范围或含义。

公开(公告)号：US06303976B1

公开(公告)日：2001-10-16

申请号：US09571179

申请日：2000-05-16

申请人： Michael Gaitan ,  Edwin D. Bowen ,  Veljko Milanovic

发明人： Michael Gaitan ,  Edwin D. Bowen ,  Veljko Milanovic

IPC分类号： H01L2906

CPC分类号： H01L21/764

摘要： A method for forming a single cavity in a substrate, which may extend approximately the length of a device located on top of the substrate, and device produced thereby. The device has a length and a width, and may extend approximately the length of the substrate. After locating the device on the surface of the substrate, a first etchant is applied through openings on the surface of the substrate. Subsequently, a second etchant is applied through the same openings on the surface of the substrate. As a result, a single cavity is formed beneath the surface of the device, suspending the device and minimizing electrical coupling.

摘要翻译： 在衬底中形成单个空腔的方法，其可以延伸到位于衬底顶部的器件的大致长度，以及由此产生的器件。 该装置具有长度和宽度，并且可以大致延伸到衬底的长度。 在将器件定位在衬底的表面上之后，通过衬底表面上的开口施加第一蚀刻剂。 随后，通过基板表面上相同的开口施加第二蚀刻剂。 结果，在器件的表面下方形成单个空腔，悬挂该器件并使电耦合最小化。

公开(公告)号：US20080061026A1

公开(公告)日：2008-03-13

申请号：US11938197

申请日：2007-11-09

申请人： Veljko Milanovic ,  Gabriel Matus

发明人： Veljko Milanovic ,  Gabriel Matus

IPC分类号： H01L21/461 ,  C23F1/00 ,  H01L21/302

CPC分类号： G02B26/0841 ,  B81B3/0062

摘要： Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of operation for both axes. Actuators are connected to a device, or device mount by linkages that allow static two-axis rotation in addition to pistoning without the need for gimbals, or specialized isolation technologies. The device may be actuated by vertical comb-drive actuators, which are coupled by bi-axial flexures to a central micromirror or device mount. Devices may be fabricated by etching an upper layer both from the top side and from the bottom side to form beams at different levels. The beams include a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams That form vertical combdrive actuators, suspension beams, flexures, and a device mount.

摘要翻译： 公开了具有大静态光束偏转和制造方法的完全整体式万向节微机电系统（MEMS）装置。 这些设备可以实现两个轴的高速运行。 执行器通过连接件连接到设备或设备安装件，除了活塞之外，还可以进行静态双轴旋转，而不需要万向节或专门的隔离技术。 该装置可以由垂直梳状驱动致动器致动，其通过双轴向挠曲联接到中心微镜或装置安装座。 可以通过从顶侧和底侧蚀刻上层来形成不同级别的波束来制造器件。 梁包括多个下梁，多个全厚度梁和多个上梁，下，全厚和上梁，其形成垂直梳齿驱动致动器，悬架梁，挠曲件和装置安装件。

公开(公告)号：US08043513B2

公开(公告)日：2011-10-25

申请号：US11938197

申请日：2007-11-09

申请人： Veljko Milanovic ,  Gabriel A. Matus

发明人： Veljko Milanovic ,  Gabriel A. Matus

IPC分类号： C23F1/00

CPC分类号： G02B26/0841 ,  B81B3/0062

摘要： Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of operation for both axes. Actuators are connected to a device, or device mount by linkages that allow static two-axis rotation in addition to pistoning without the need for gimbals, or specialized isolation technologies. The device may be actuated by vertical comb-drive actuators, which are coupled by bi-axial flexures to a central micromirror or device mount. Devices may be fabricated by etching an upper layer both from the top side and from the bottom side to form beams at different levels. The beams include a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams That form vertical combdrive actuators, suspension beams, flexures, and a device mount.

摘要翻译： 公开了具有大静态光束偏转和制造方法的完全整体式万向节微机电系统（MEMS）装置。 这些设备可以实现两个轴的高速运行。 执行器通过连接件连接到设备或设备安装件，除了活塞之外，还可以进行静态双轴旋转，而不需要万向节或专门的隔离技术。 该装置可以由垂直梳状驱动致动器致动，其通过双轴向挠曲联接到中心微镜或装置安装座。 可以通过从顶侧和底侧蚀刻上层来形成不同级别的波束来制造器件。 梁包括多个下梁，多个全厚度梁和多个上梁，下，全厚和上梁，其形成垂直梳齿驱动致动器，悬架梁，挠曲件和装置安装件。

公开(公告)号：US07295726B1

公开(公告)日：2007-11-13

申请号：US11003271

申请日：2004-12-02

申请人： Veljko Milanovic ,  Gabriel A. Matus

发明人： Veljko Milanovic ,  Gabriel A. Matus

IPC分类号： G02B6/26 ,  G02B6/35

CPC分类号： G02B26/0841 ,  B81B3/0062

摘要： Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of operation for both axes. Actuators are connected to a device, or device mount by linkages that allow static two-axis rotation in addition to pistoning without the need for gimbals, or specialized isolation technologies. The device may be actuated by vertical comb-drive actuators, which are coupled by bi-axial flexures to a central micromirror or device mount. Devices may be fabricated by etching an upper layer both from the top side and from the bottom side to form beams at different levels, The beams include a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams That form vertical combdrive actuators, suspension beams, flexures, and a device mount.

摘要翻译： 公开了具有大静态光束偏转和制造方法的完全整体式万向节微机电系统（MEMS）装置。 这些设备可以实现两个轴的高速运行。 执行器通过连接件连接到设备或设备安装件，除了活塞之外，还可以进行静态双轴旋转，而不需要万向节或专门的隔离技术。 该装置可以由垂直梳状驱动致动器致动，其通过双轴向挠曲联接到中心微镜或装置安装座。 器件可以通过从顶侧和从底侧蚀刻上层来形成不同级别的波束。波束包括多个下梁，多个全厚度梁和多个上梁， 下，全厚度和上梁形成垂直梳齿驱动执行器，悬架梁，挠性件和装置安装。

公开(公告)号：US08729770B1

公开(公告)日：2014-05-20

申请号：US12781766

申请日：2010-05-17

申请人： Veljko Milanovic

发明人： Veljko Milanovic

IPC分类号： H02N1/00 ,  H02N1/04

CPC分类号： G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2203/0118 ,  B81B2203/058 ,  G02B7/1821

摘要： A MEMS system comprises a first rotational actuator having a first drive mechanism configured to drive rotation of a first rotator about a first axis, a second rotational actuator having a second drive mechanism configured to drive rotation of a second rotator about a second axis, first and second flexible linkages, a first drive beam coupled to the first rotator and to the first flexible linkage, a second drive beam coupled to the second rotator and to the second flexible linkage, and one or more device mounts coupled to the first and second flexible linkages. The one or more device mounts are configured to provide distributed points of attachment of a device. The rotation of the first and second rotators causes the device mount to rotate or piston.

摘要翻译： MEMS系统包括具有第一驱动机构的第一旋转致动器，第一驱动机构被配置为驱动围绕第一轴线旋转第一旋转器，第二旋转致动器具有第二驱动机构，该第二驱动机构构造成驱动第二旋转器围绕第二轴线的旋转， 第二柔性连接件，耦合到第一旋转器和第一柔性连接件的第一驱动梁，耦合到第二旋转器和第二柔性连杆的第二驱动梁，以及联接到第一和第二柔性连杆的一个或多个装置安装件 。 一个或多个设备安装件被配置为提供设备的分布式附着点。 第一和第二转子的旋转导致装置安装件旋转或活塞。

公开(公告)号：US07428353B1

公开(公告)日：2008-09-23

申请号：US11465835

申请日：2006-08-21

申请人： Veljko Milanovic ,  Kenneth Castelino

发明人： Veljko Milanovic ,  Kenneth Castelino

IPC分类号： G02B6/26 ,  G02B6/35

CPC分类号： G02B26/0841

摘要： A MEMS system is disclosed. The system includes a MEMS device having including a gimbal-less device mount supported by two or more bi-axial linkages. Each bi-axial linkage is mechanically coupled between the device mount and an actuator. Each bi-axial linkage is distinct from the actuator. Each bi-axial linkage includes a first flexure beam configured to flex about a first axis and a second flexure beam attached to the first flexure beam. The second flexure beam is configured to flex about a second axis. The two or more bi-axial linkages provide the device mount with two or more degrees of freedom of movement. The bi axial linkages and device mount are formed from the same device layer. The MEMS device has a mechanical response that is approximately proportional to a square of a drive voltage. A signal converter is adapted to convert a signal representing a desired position of the MEMS device to a voltage and a filter is coupled to the signal converter. The filter has a substantially flat group delay response. The filter doesn't retain any frequencies at or near a natural resonant frequency ωn of the MEMS device. An output of the filter or signal converter is coupled to MEMS device to provide the drive voltage.

摘要翻译： 公开了一种MEMS系统。 该系统包括具有由两个或更多个双轴向联接支撑的无万向节装置安装件的MEMS装置。 每个双轴向连杆机构连接在装置支架和致动器之间。 每个双轴联动与执行器不同。 每个双轴向联动装置包括构造成围绕第一轴线弯曲的第一弯曲梁和连接到第一弯曲梁的第二挠曲梁。 第二弯曲梁被配置为围绕第二轴弯曲。 两个或更多个双轴向连杆提供装置安装件具有两个或多个自由度的运动。 双轴向连杆和装置安装件由相同的装置层形成。 MEMS器件具有与驱动电压的平方近似成比例的机械响应。 信号转换器适于将表示MEMS器件的期望位置的信号转换为电压，并且滤波器耦合到信号转换器。 滤波器具有基本平坦的组延迟响应。 滤波器不保持在MEMS器件的固有谐振频率ω或n附近的任何频率。 滤波器或信号转换器的输出耦合到MEMS器件以提供驱动电压。

公开(公告)号：US06171880B2

公开(公告)日：2001-01-09

申请号：US09332112

申请日：1999-06-14

申请人： Michael Gaitan ,  Nim Tea ,  Edwin D. Bowen ,  Veljko Milanovic

发明人： Michael Gaitan ,  Nim Tea ,  Edwin D. Bowen ,  Veljko Milanovic

IPC分类号： H01L2100

CPC分类号： G01C9/00 ,  G01P15/008 ,  G01P15/0802 ,  G01P15/12 ,  G01P15/18

摘要： A method is provided for the manufacture of a convective accelerometer and tilt sensor device using CMOS techniques. An integrated circuit chip is produced which includes a silicon substrate having an integrated circuit pattern thereon including a heater element located centrally of the substrate and at least first and second thermocouple elements located on the substrate on opposite sides of the heater element. Thereafter, portions of the substrate surrounding and beneath the heater and thermocouple elements are etched away to suspend the element on the substrate and thus to thermally isolate the elements from the substrate. The substrate is etched up to the cold thermocouple junction of the thermocouple elements so the cold junction remains on the substrate.

摘要翻译： 提供了一种使用CMOS技术制造对流加速度计和倾斜传感器装置的方法。 制造集成电路芯片，其包括其上具有集成电路图案的硅衬底，其包括位于衬底中心的加热器元件和位于加热器元件的相对侧上的衬底上的至少第一和第二热电偶元件。 此后，加热器和热电偶元件周围和下方的部分基板被蚀刻掉以将元件悬浮在基板上，从而将元件与基板热隔离。 衬底被蚀刻到热电偶元件的冷热电偶接头处，使得冷接点保留在衬底上。