发明申请
- 专利标题: ORGANIC LAYER DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE SAME
- 专利标题(中): 有机层沉积装置及使用其制造有机发光显示装置的方法
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申请号: US13470077申请日: 2012-05-11
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公开(公告)号: US20120301986A1公开(公告)日: 2012-11-29
- 发明人: Myong-Hwan Choi , Mu-Hyun Kim , Sung-Bong Lee , Myung-Ki Lee
- 申请人: Myong-Hwan Choi , Mu-Hyun Kim , Sung-Bong Lee , Myung-Ki Lee
- 优先权: KR10-2011-0049794 20110525
- 主分类号: H01L51/52
- IPC分类号: H01L51/52 ; B05B15/04 ; B05B1/00
摘要:
An organic layer deposition apparatus including: a deposition source configured to discharge a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; a patterning slit sheet facing the deposition source nozzle unit and including a plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction; a blocking member configured to be disposed between the substrate and the deposition source to block at least a portion of the substrate; and a heating member on the blocking member and configured to heat the blocking member, and the substrate is spaced apart from the organic layer deposition apparatus by a predetermined distance, and the substrate or the organic layer deposition apparatus is movable relative to the other.
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