A laser beam having a single wavelength emitted from a laser light source is converted at a wavelength shifter into a laser beam having at least two wavelengths, which is further demultiplexed at a beam splitter into a laser beam having a first wavelength and a laser beam having a second wavelength. The output power and pulse width of the laser beam having the first wavelength are adjusted by a first controller so as to reach levels appropriate for generating ultrasonic vibrations without causing damage to an inspection object. The output power and pulse width of the laser beam having the second wavelength are adjusted by a second controller so as to reach appropriate levels for detecting the above-described ultrasonic vibrations. These laser beams are multiplexed by a multiplexer into a single laser beam to be focused onto a surface of the inspection object.