发明申请
- 专利标题: SUBSTRATE INSPECTION APPARATUS AND METHOD FOR OPERATING THE SAME
- 专利标题(中): 基板检查装置及其操作方法
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申请号: US13482270申请日: 2012-05-29
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公开(公告)号: US20120307045A1公开(公告)日: 2012-12-06
- 发明人: Kazuya Hisano , Hiroshi Tomita , Norihisa Koga , Tadashi Nishiyama , Makoto Hayakawa
- 申请人: Kazuya Hisano , Hiroshi Tomita , Norihisa Koga , Tadashi Nishiyama , Makoto Hayakawa
- 申请人地址: JP Minato-Ku
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Minato-Ku
- 优先权: JP2011-120917 20110530
- 主分类号: H04N7/18
- IPC分类号: H04N7/18
摘要:
In one embodiment, a substrate inspection apparatus performs, in its maintenance mode, operations including: guiding a light emitted from an illuminating unit to an imaging device via a light-guiding member disposed in a casing; judging whether or not a level of a brightness signal obtained by the imaging device falls within a predetermined allowable range when a light emitted from the illuminating unit falls on the imaging device via the light-guiding member; and alarming, if it is judged that the value of the brightness signal is out of the predetermined allowable range, that replacement of the illuminating unit is required.