Invention Application
- Patent Title: HETERO-STRUCTURED INVERTED-T FIELD EFFECT TRANSISTOR
- Patent Title (中): 异构结构的反相场效应晶体管
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Application No.: US13584673Application Date: 2012-08-13
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Publication No.: US20120309141A1Publication Date: 2012-12-06
- Inventor: Hemant Adhikari , Rusty Harris
- Applicant: Hemant Adhikari , Rusty Harris
- Assignee: Advanced Micro Devices, Inc.
- Current Assignee: Advanced Micro Devices, Inc.
- Main IPC: H01L21/335
- IPC: H01L21/335

Abstract:
The present invention provides a method of forming a transistor. The method includes forming a first layer of a first semiconductor material above an insulation layer. The first semiconductor material is selected to provide high mobility to a first carrier type. The method also includes forming a second layer of a second semiconductor material above the first layer of semiconductor material. The second semiconductor material is selected to provide high mobility to a second carrier type opposite the first carrier type. The method further includes forming a first masking layer adjacent the second layer and etching the second layer through the first masking layer to form at least one feature in the second layer. Each feature in the second layer forms an inverted-T shape with a portion of the second layer.
Public/Granted literature
- US08815658B2 Hetero-structured inverted-T field effect transistor Public/Granted day:2014-08-26
Information query
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