Invention Application
US20120309141A1 HETERO-STRUCTURED INVERTED-T FIELD EFFECT TRANSISTOR 有权
异构结构的反相场效应晶体管

HETERO-STRUCTURED INVERTED-T FIELD EFFECT TRANSISTOR
Abstract:
The present invention provides a method of forming a transistor. The method includes forming a first layer of a first semiconductor material above an insulation layer. The first semiconductor material is selected to provide high mobility to a first carrier type. The method also includes forming a second layer of a second semiconductor material above the first layer of semiconductor material. The second semiconductor material is selected to provide high mobility to a second carrier type opposite the first carrier type. The method further includes forming a first masking layer adjacent the second layer and etching the second layer through the first masking layer to form at least one feature in the second layer. Each feature in the second layer forms an inverted-T shape with a portion of the second layer.
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