发明申请
- 专利标题: MOS Transistor Having Combined-Source Structure With Low Power Consumption and Method for Fabricating the Same
- 专利标题(中): 具有低功耗的组合源结构的MOS晶体管及其制造方法
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申请号: US13501241申请日: 2011-10-14
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公开(公告)号: US20120313154A1公开(公告)日: 2012-12-13
- 发明人: Ru Huang , Qianqian Huang , Zhan Zhan , Xin Huang , Yangyuan Wang
- 申请人: Ru Huang , Qianqian Huang , Zhan Zhan , Xin Huang , Yangyuan Wang
- 申请人地址: CN Beijing
- 专利权人: PEKING UNIVERSITY
- 当前专利权人: PEKING UNIVERSITY
- 当前专利权人地址: CN Beijing
- 优先权: CN201010560176.4 20101125
- 国际申请: PCT/CN11/80779 WO 20111014
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L29/78
摘要:
The present invention discloses a MOS transistor having a combined-source structure with low power consumption, which relates to a field of field effect transistor logic devices and circuits in CMOS ultra-large-scaled integrated circuits. The MOS transistor includes a control gate electrode layer, a gate dielectric layer, a semiconductor substrate, a Schottky source region, a highly-doped source region and a highly-doped drain region. An end of the control gate extends to the highly-doped source region to form a T shape, wherein the extending region of the control gate is an extending gate and the remaining region of the control gate is a main gate. The active region covered by the extending gate is a channel region, and material thereof is the substrate material. A Schottky junction is formed between the Schottky source region and the channel under the extending gate. The combined-source structure according to the invention combines a Schottky barrier and a T-shaped gate, improves the performance of the device, and the fabrication method thereof is simple. Thus, a higher turn-on current, a lower leakage current, and a steeper subthreshold slope can be obtained, and the present application can be applied in the field of low power consumption and have a higher practical value.
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