发明申请
- 专利标题: INSPECTION DEVICE AND INSPECTION METHOD
- 专利标题(中): 检查装置和检查方法
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申请号: US13580273申请日: 2010-12-01
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公开(公告)号: US20120313650A1公开(公告)日: 2012-12-13
- 发明人: Hiroshi Kawaguchi , Minori Noguchi , Kenji Aiko , Masami Makuuchi
- 申请人: Hiroshi Kawaguchi , Minori Noguchi , Kenji Aiko , Masami Makuuchi
- 申请人地址: JP Minato-ku, Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Minato-ku, Tokyo
- 优先权: JP2010-069114 20100325
- 国际申请: PCT/JP2010/007000 WO 20101201
- 主分类号: G01R27/26
- IPC分类号: G01R27/26
摘要:
An inspection device for detecting small foreign bodies is provided with a first electrode and a second electrode disposed on either side of the inspection target, a power source connected to the aforementioned first electrode, a conveyance speed control unit for controlling the conveyance speed of the aforementioned inspection target, a current detection unit which, connected to the aforementioned second electrode, detects currents generated by changes in the static capacitance formed between the aforementioned first electrode and the aforementioned second electrode, and a defect detection unit which detects defects on the basis of the aforementioned current. Furthermore, the aforementioned second electrode rotates in the direction opposite of the conveyance direction of the aforementioned inspection target. Furthermore, the aforementioned power source includes a DC or an AC power source.