发明申请
- 专利标题： PIEZOELECTRIC ACTUATOR MECHANISM
- 专利标题（中）： 压电致动器机构
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申请号： US13579377申请日： 2011-01-26
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公开(公告)号： US20120314269A1公开(公告)日： 2012-12-13
- 发明人: Masahiro Takano , Kenichi Hirosaki , Ryuji Shintani , Yuta Yoshida , Toshiharu Minamikawa , Kouichi Nakano , Takuya Nagata , Shou Makino , Satoru Ichimura , Takashi Yoshida , Masayuki Ishida , Hiroshi Kawai , Mikio Takimoto , Kentaro Nakamura
- 申请人： Masahiro Takano , Kenichi Hirosaki , Ryuji Shintani , Yuta Yoshida , Toshiharu Minamikawa , Kouichi Nakano , Takuya Nagata , Shou Makino , Satoru Ichimura , Takashi Yoshida , Masayuki Ishida , Hiroshi Kawai , Mikio Takimoto , Kentaro Nakamura
- 申请人地址： JP Kanazawa-shi, Ishikawa JP Tokyo JP Hakusan-shi, Ishikawa JP Hidaka-shi, Saitama
- 专利权人： ISHIKAWA PREFECTURE,TOKYO INSTITUTE OF TECHNOLOGY,NIKKO COMPANY,SIGMA KOKI CO., LTD
- 当前专利权人： ISHIKAWA PREFECTURE,TOKYO INSTITUTE OF TECHNOLOGY,NIKKO COMPANY,SIGMA KOKI CO., LTD
- 当前专利权人地址： JP Kanazawa-shi, Ishikawa JP Tokyo JP Hakusan-shi, Ishikawa JP Hidaka-shi, Saitama
- 优先权： JP2010-031954 20100217
- 国际申请： PCT/JP2011/051419 WO 20110126
- 主分类号： H02N2/04
- IPC分类号： H02N2/04 ; G02B26/08 ; H02N2/12
摘要：
A piezoelectric actuator mechanism including: a screw-driven feeding mechanism that has a feed screw (11) and a feed screw nut (14); a disc-shaped rotor (17) mounted on the rear-end face of the feed screw nut (14); an ultrasonic motor (18) having a piezoelectric vibrator (19) that comes in contact with the circumference face of the rotor (17); and a driven mounting portion that is pressed against the leading end of the feed screw 11 by spring force, and displaced and positioned by the feeding operation of the feed screw. The driven mounting portion can be made to be a mirror holder (1) for use in an optical system, or a movable table (21) of a linear stage.
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