公开(公告)号：US09099640B2

公开(公告)日：2015-08-04

申请号：US13575544

申请日：2011-01-26

申请人： Masahiro Takano ,  Kenichi Hirosaki ,  Yuta Yoshida ,  Takuya Nagata ,  Shou Makino ,  Satoru Ichimura ,  Takashi Yoshida ,  Masayuki Ishida ,  Hiroshi Kawai ,  Mikio Takimoto ,  Kentaro Nakamura

发明人： Masahiro Takano ,  Kenichi Hirosaki ,  Yuta Yoshida ,  Takuya Nagata ,  Shou Makino ,  Satoru Ichimura ,  Takashi Yoshida ,  Masayuki Ishida ,  Hiroshi Kawai ,  Mikio Takimoto ,  Kentaro Nakamura

IPC分类号： H01L41/047 ,  H01L41/09 ,  H02N2/00

CPC分类号： H01L41/0913 ,  H01L41/047 ,  H02N2/004

摘要： Electrodes (7, 8, 9), having curved sections in the shape of the outline thereof, are disposed in areas of a rectangular plate-shaped piezoelectric transducer element (1) in which the strain in the natural mode of vibration is large. The electrodes (7, 8) which excite a bending vibration are disposed in areas in which the strain in the bending natural mode is at least a predetermined value, and the outline curved sections of the electrodes (7, 8) are shaped so as to follow along strain contours (3, 4), and the electrode (9) which excites a stretching vibration is disposed in an area in which the strain in the stretching natural mode is at least a predetermined value, thus providing a transducer for an ultrasonic motor which aims to reduce transducer loss (increasing vibration efficiency), and improve transducer durability and reliability.

摘要翻译： 具有其轮廓形状的弯曲部分的电极（7,8,9）设置在其中自然振动模式下的应变大的矩形板状压电换能器元件（1）的区域中。 激励弯曲振动的电极（7,8）设置在弯曲自然模式中的应变至少为预定值的区域中，并且电极（7,8）的轮廓弯曲部分成形为 遵循应变轮廓（3,4），并且激发伸缩振动的电极（9）设置在拉伸自然模式中的应变至少为预定值的区域中，从而提供用于超声波马达的换能器 旨在减少传感器损耗（提高振动效率），提高传感器的耐用性和可靠性。

公开(公告)号：US20120293043A1

公开(公告)日：2012-11-22

申请号：US13575544

申请日：2011-01-26

申请人： Masahiro Takano ,  Kenichi Hirosaki ,  Yuta Yoshida ,  Takuya Nagata ,  Shou Makino ,  Satoru Ichimura ,  Takashi Yoshida ,  Masayuki Ishida ,  Hiroshi Kawai ,  Mikio Takimoto ,  Kentaro Nakamura

发明人： Masahiro Takano ,  Kenichi Hirosaki ,  Yuta Yoshida ,  Takuya Nagata ,  Shou Makino ,  Satoru Ichimura ,  Takashi Yoshida ,  Masayuki Ishida ,  Hiroshi Kawai ,  Mikio Takimoto ,  Kentaro Nakamura

IPC分类号： H02N2/04

CPC分类号： H01L41/0913 ,  H01L41/047 ,  H02N2/004

摘要： Electrodes (7, 8, 9), having curved sections in the shape of the outline thereof, are disposed in areas of a rectangular plate-shaped piezoelectric transducer element (1) in which the strain in the natural mode of vibration is large. The eletrodes (7, 8) which excite a bending vibration are disposed in areas in which the strain in the bending natural mode is at least a predetermined value, and the outline curved sections of the electrodes (7, 8) are shaped so as to follow along strain contours (3, 4), and the electrode (9) which excites a stretching vibration is disposed in an area in which the strain in the stretching natural mode is at least a predetermined value, thus providing a transducer for an ultrasonic motor which aims to reduce transducer loss (increasing vibration efficiency), and improve transducer durability and reliability.

摘要翻译： 具有其轮廓形状的弯曲部分的电极（7,8,9）设置在其中自然振动模式下的应变大的矩形板状压电换能器元件（1）的区域中。 激励弯曲振动的电极（7,8）设置在弯曲自然模式中的应变至少为预定值的区域中，并且电极（7,8）的轮廓弯曲部分成形为 遵循应变轮廓（3,4），并且激发伸缩振动的电极（9）设置在拉伸自然模式中的应变至少为预定值的区域中，从而提供用于超声波马达的换能器 旨在减少传感器损耗（提高振动效率），提高传感器的耐用性和可靠性。

公开(公告)号：US06742977B1

公开(公告)日：2004-06-01

申请号：US09503916

申请日：2000-02-15

申请人： Satohiro Okayama ,  Motoichi Kanazawa ,  Takeshige Ishida ,  Tomohiko Takeda ,  Yukio Akita ,  Satoru Ichimura ,  Kazunori Suzuki ,  Teruo Yoshino ,  Tokunobu Akao ,  Yasunobu Nakayama

发明人： Satohiro Okayama ,  Motoichi Kanazawa ,  Takeshige Ishida ,  Tomohiko Takeda ,  Yukio Akita ,  Satoru Ichimura ,  Kazunori Suzuki ,  Teruo Yoshino ,  Tokunobu Akao ,  Yasunobu Nakayama

IPC分类号： H01L2168

CPC分类号： H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  Y10S414/135 ,  Y10S414/14

摘要： An unprocessed substrate is conveyed to a film-processing chamber at the same time a processed substrate is conveyed to a substrate preparation chamber, reducing the substrate processing cycle, thereby increasing the yield per unit time. The substrate preparation chamber has a two-tiered structure for receiving processed substrates and unprocessed substrates. A two-tiered transfer robot allows the substrates to be removed or placed into the preparation and process chambers at the same time, thus decreasing the cycle time for processing a substrate.

摘要翻译： 将未处理的基板输送到膜处理室，同时将处理后的基板输送到基板准备室，减少基板处理循环，从而提高单位时间的产量。 衬底制备室具有用于接收经处理的衬底和未处理衬底的双层结构。 双层传送机器人可以将基板同时移除或放置在准备和处理室中，从而减少加工基板的循环时间。

公开(公告)号：US20120314269A1

公开(公告)日：2012-12-13

申请号：US13579377

申请日：2011-01-26

申请人： Masahiro Takano ,  Kenichi Hirosaki ,  Ryuji Shintani ,  Yuta Yoshida ,  Toshiharu Minamikawa ,  Kouichi Nakano ,  Takuya Nagata ,  Shou Makino ,  Satoru Ichimura ,  Takashi Yoshida ,  Masayuki Ishida ,  Hiroshi Kawai ,  Mikio Takimoto ,  Kentaro Nakamura

发明人： Masahiro Takano ,  Kenichi Hirosaki ,  Ryuji Shintani ,  Yuta Yoshida ,  Toshiharu Minamikawa ,  Kouichi Nakano ,  Takuya Nagata ,  Shou Makino ,  Satoru Ichimura ,  Takashi Yoshida ,  Masayuki Ishida ,  Hiroshi Kawai ,  Mikio Takimoto ,  Kentaro Nakamura

IPC分类号： H02N2/04 ,  G02B26/08 ,  H02N2/12

CPC分类号： H02N2/123 ,  H02N2/103 ,  H02N2/126

摘要： A piezoelectric actuator mechanism including: a screw-driven feeding mechanism that has a feed screw (11) and a feed screw nut (14); a disc-shaped rotor (17) mounted on the rear-end face of the feed screw nut (14); an ultrasonic motor (18) having a piezoelectric vibrator (19) that comes in contact with the circumference face of the rotor (17); and a driven mounting portion that is pressed against the leading end of the feed screw 11 by spring force, and displaced and positioned by the feeding operation of the feed screw. The driven mounting portion can be made to be a mirror holder (1) for use in an optical system, or a movable table (21) of a linear stage.

摘要翻译： 一种压电致动器机构，包括：具有进给螺杆（11）和进给螺母（14）的螺杆驱动进给机构; 安装在进给螺母（14）的后端面上的圆盘形转子（17）; 具有与转子（17）的圆周面接触的压电振动器（19）的超声波马达（18）。 以及通过弹簧力压靠进给螺杆11的前端的从动安装部，通过进给螺杆的进给动作而移位和定位。 从动安装部分可以制成用于光学系统的反射镜保持器（1）或线性平台的可移动台（21）。