发明申请
US20120318058A1 HEAT CONDUCTION-TYPE SENSOR FOR CALIBRATING EFFECTS OF TEMPERATURE AND TYPE OF FLUID, AND THERMAL FLOW SENSOR AND THERMAL BAROMETRIC SENSOR USING THIS SENSOR
有权
用于校准温度和流体类型的热传导型传感器,以及使用该传感器的热流量传感器和热量传感器
- 专利标题: HEAT CONDUCTION-TYPE SENSOR FOR CALIBRATING EFFECTS OF TEMPERATURE AND TYPE OF FLUID, AND THERMAL FLOW SENSOR AND THERMAL BAROMETRIC SENSOR USING THIS SENSOR
- 专利标题(中): 用于校准温度和流体类型的热传导型传感器,以及使用该传感器的热流量传感器和热量传感器
-
申请号: US13389565申请日: 2012-01-13
-
公开(公告)号: US20120318058A1公开(公告)日: 2012-12-20
- 发明人: Mitsuteru Kimura
- 申请人: Mitsuteru Kimura
- 申请人地址: JP Miyagi
- 专利权人: Tohoku Gakuin
- 当前专利权人: Tohoku Gakuin
- 当前专利权人地址: JP Miyagi
- 优先权: JP2011-032745 20110218
- 国际申请: PCT/JP2012/050593 WO 20120113
- 主分类号: G01F1/68
- IPC分类号: G01F1/68 ; G01L7/00 ; G01K17/16 ; G01K15/00
摘要:
A heat conduction-type sensor corrects (calibrate) effects of a temperature of a measurement target fluid and a type of the fluid on a measurement value in measurement of a flow velocity, a mass flow, or an atmospheric pressure. Also provided is a thermal flow sensor and a thermal barometric sensor with this correcting function, high sensitivity, simple configuration, and low cost. At least two thin films that are thermally separated from a substrate through the same cavity are provided, one thin film comprises a heater and a temperature sensor, and the other thin film comprises at least one temperature sensor, the temperature sensors being thin-film thermocouples. The thin film is arranged in proximity so that it is heated only through the measurement target fluid by heating of the heater. A calibration circuit calculates and compares quantities concerning heat transfer coefficients of a standard fluid and the unknown measurement target fluid.
公开/授权文献
信息查询