The method of manufacturing a thermoelectric conversion module includes the steps of providing a first inner surface of a first substrate with plural first electrodes and a first positioning portion, wherein the first positioning portion is located at a predetermined position to the first electrodes without overlapping with the first electrodes, providing a second inner surface of a second substrate with plural second electrodes and a second positioning portion, wherein the second positioning portion is located at a predetermined position to the second electrodes without overlapping with the second electrodes, providing the first electrodes with plural thermoelectric conversion elements, positioning a spacer to the first substrate with a third positioning portion of the spacer on the first positioning portion, and providing the thermoelectric conversion elements with the second electrodes by positioning the second substrate to the spacer with the second positioning portion on a fourth positioning portion of the spacer.