发明申请
US20120326157A1 Method of Manufacturing Thin Film Transistor, Thin Film Transistor Manufactured Using the Method, Method of Manufacturing Organic Light-Emitting Display Apparatus, and Organic Light-Emitting Display Apparatus Manufactured Using the Method
有权
使用该方法制造薄膜晶体管的薄膜晶体管的制造方法,制造有机发光显示装置的方法和使用该方法制造的有机发光显示装置
- 专利标题: Method of Manufacturing Thin Film Transistor, Thin Film Transistor Manufactured Using the Method, Method of Manufacturing Organic Light-Emitting Display Apparatus, and Organic Light-Emitting Display Apparatus Manufactured Using the Method
- 专利标题(中): 使用该方法制造薄膜晶体管的薄膜晶体管的制造方法,制造有机发光显示装置的方法和使用该方法制造的有机发光显示装置
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申请号: US13313555申请日: 2011-12-07
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公开(公告)号: US20120326157A1公开(公告)日: 2012-12-27
- 发明人: Byoung-Keon Park , Jong-Ryuk Park , Tak-Young Lee , Jin-Wook Seo , Ki-Yong Lee
- 申请人: Byoung-Keon Park , Jong-Ryuk Park , Tak-Young Lee , Jin-Wook Seo , Ki-Yong Lee
- 申请人地址: KR Yongin-City
- 专利权人: SAMSUNG MOBILE DISPLAY CO., LTD.
- 当前专利权人: SAMSUNG MOBILE DISPLAY CO., LTD.
- 当前专利权人地址: KR Yongin-City
- 优先权: KR10-2011-0060231 20110621
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L33/08 ; H01L33/16 ; H01L21/336
摘要:
A method of manufacturing a TFT, including forming a buffer layer, an amorphous silicon layer, an insulating layer, and a first conductive layer on a substrate, forming a polycrystalline silicon layer by crystallizing the amorphous silicon layer, forming a semiconductor layer, a gate insulating layer, and a gate electrode that have a predetermined shape by simultaneously patterning the polycrystalline silicon layer, the insulating layer, and the first conductive layer, wherein the polycrystalline silicon layer is further etched to produce an undercut recessed a distance compared to sidewalls of the insulating layer and the first conductive layer, forming source and drain regions within the semiconductor layer by doping corresponding portions of the semiconductor layer, forming an interlayer insulating layer on the gate electrode, the interlayer insulating layer covering the gate insulating layer and forming source and drain electrodes that are electrically connected to source and drain regions respectively.