发明申请
- 专利标题： DISPLAY DEVICE AND MANUFACTURING METHOD OF THE DISPLAY DEVICE
- 专利标题（中）： 显示装置的显示装置和制造方法
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申请号： US13526568申请日： 2012-06-19
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公开(公告)号： US20120326179A1公开(公告)日： 2012-12-27
- 发明人: Takuo KAITOH , Takeshi KURIYAGAWA , Ryou SAKATA , Osamu KARIKOME , Timothy J. BROSNIHAN
- 申请人： Takuo KAITOH , Takeshi KURIYAGAWA , Ryou SAKATA , Osamu KARIKOME , Timothy J. BROSNIHAN
- 专利权人： PIXTRONIX, INC.,HITACHI DISPLAYS, LTD.
- 当前专利权人： PIXTRONIX, INC.,HITACHI DISPLAYS, LTD.
- 优先权： JP2011-137656 20110621
- 主分类号： H01L27/15
- IPC分类号： H01L27/15 ; H01L33/58
摘要：
The MEMS shutter includes a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, an insulation film on a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a perpendicular direction to a surface of a substrate, and the insulation film is not present on a surface of the plurality of terminals, and a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a parallel direction to a surface of the substrate and on the opposite side of the side facing the substrate.
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