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公开(公告)号：US09099359B2
公开(公告)日：2015-08-04
申请号：US13562364
申请日：2012-07-31
申请人： Miyo Ishii , Manabu Yamashita , Osamu Karikome
发明人： Miyo Ishii , Manabu Yamashita , Osamu Karikome
IPC分类号： H01L27/12
CPC分类号： H01L27/1244 , H01L27/1248 , H01L27/1288
摘要： A display device includes an electrode layer formed at a predetermined position on a substrate, an insulating film having a through-hole formed on the top of the electrode layer, and a wiring film connected to the electrode layer via the through-hole formed in the insulating film. Based on a surface of the substrate, the through-hole includes a first taper portion having a first taper angle, a second taper portion formed higher than the first taper portion and having a second taper angle different from the first taper angle, and a third taper portion formed higher than the second taper portion and having a third taper angle different from the second taper angle.
摘要翻译： 显示装置包括形成在基板上的预定位置的电极层，在电极层的顶部形成有通孔的绝缘膜，以及通过形成在电极层中的通孔与电极层连接的布线膜 绝缘膜。 基于基板的表面，通孔包括具有第一锥角的第一锥形部分，形成为高于第一锥形部分并且具有不同于第一锥角的第二锥角的第二锥形部分，以及第三锥形部分 锥形部分形成为高于第二锥形部分并且具有不同于第二锥角的第三锥角。
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公开(公告)号：US20120326179A1
公开(公告)日：2012-12-27
申请号：US13526568
申请日：2012-06-19
CPC分类号： G02B26/0841 , B81B7/007 , B81B2201/045 , B81C2201/0132 , B81C2201/016
摘要： The MEMS shutter includes a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, an insulation film on a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a perpendicular direction to a surface of a substrate, and the insulation film is not present on a surface of the plurality of terminals, and a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a parallel direction to a surface of the substrate and on the opposite side of the side facing the substrate.
摘要翻译： MEMS快门包括具有开口部分的快门，连接到快门的第一弹簧，连接到第一弹簧的第一锚杆，连接到第二弹簧的第二弹簧和第二锚固件，在挡板的表面上的绝缘膜 所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在垂直于基板表面的方向上，并且所述绝缘膜不存在于所述多个端子的表面上，并且所述表面 所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在与所述基板的表面平行的方向上以及在面向所述基板的所述一侧的相对侧上。
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公开(公告)号：US08970940B2
公开(公告)日：2015-03-03
申请号：US13526568
申请日：2012-06-19
CPC分类号： G02B26/0841 , B81B7/007 , B81B2201/045 , B81C2201/0132 , B81C2201/016
摘要： The MEMS shutter includes a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, an insulation film on a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a perpendicular direction to a surface of a substrate, and the insulation film is not present on a surface of the plurality of terminals, and a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a parallel direction to a surface of the substrate and on the opposite side of the side facing the substrate.
摘要翻译： MEMS快门包括具有开口部分的快门，连接到快门的第一弹簧，连接到第一弹簧的第一锚杆，连接到第二弹簧的第二弹簧和第二锚固件，在挡板的表面上的绝缘膜 所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在垂直于基板表面的方向上，并且所述绝缘膜不存在于所述多个端子的表面上，并且所述表面 所述第一弹簧，所述第二弹簧，所述第一锚固件和所述第二锚固件，所述表面在与所述基板的表面平行的方向上以及在面向所述基板的所述一侧的相对侧上。
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公开(公告)号：US20130032832A1
公开(公告)日：2013-02-07
申请号：US13562364
申请日：2012-07-31
申请人： Miyo ISHII , Manabu YAMASHITA , Osamu KARIKOME
发明人： Miyo ISHII , Manabu YAMASHITA , Osamu KARIKOME
IPC分类号： H01L33/08 , H01L21/336
CPC分类号： H01L27/1244 , H01L27/1248 , H01L27/1288
摘要： A display device includes an electrode layer formed at a predetermined position on a substrate, an insulating film having a through-hole formed on the top of the electrode layer, and a wiring film connected to the electrode layer via the through-hole formed in the insulating film. Based on a surface of the substrate, the through-hole includes a first taper portion having a first taper angle, a second taper portion formed higher than the first taper portion and having a second taper angle different from the first taper angle, and a third taper portion formed higher than the second taper portion and having a third taper angle different from the second taper angle.
摘要翻译： 显示装置包括形成在基板上的预定位置的电极层，在电极层的顶部形成有通孔的绝缘膜，以及通过形成在电极层中的通孔与电极层连接的布线膜 绝缘膜。 基于基板的表面，通孔包括具有第一锥角的第一锥形部分，形成为高于第一锥形部分并且具有不同于第一锥角的第二锥角的第二锥形部分，以及第三锥形部分 锥形部分形成为高于第二锥形部分并且具有不同于第二锥角的第三锥角。
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