发明申请
US20120328988A1 DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND PROCESSING APPARATUS 失效
绘图装置,制造方法和加工装置

  • 专利标题: DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND PROCESSING APPARATUS
  • 专利标题(中): 绘图装置,制造方法和加工装置
  • 申请号: US13530225
    申请日: 2012-06-22
  • 公开(公告)号: US20120328988A1
    公开(公告)日: 2012-12-27
  • 发明人: Yoshihiro Hirata
  • 申请人: Yoshihiro Hirata
  • 申请人地址: JP Tokyo
  • 专利权人: CANON KABUSHIKI KAISHA
  • 当前专利权人: CANON KABUSHIKI KAISHA
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP2011-141220 20110624
  • 主分类号: G21K5/00
  • IPC分类号: G21K5/00 G03F7/20 H03F3/08
DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND PROCESSING APPARATUS
摘要:
A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams includes: a blanking deflector located in a vacuum chamber and configured to blank each of the plurality of charged particle beams; a device located in an external chamber in which a gas pressure is higher than a gas pressure in the vacuum chamber, and configured to control the blanking deflector; and a first substrate facing the blanking deflector. The first substrate constitutes a partition which separates the vacuum chamber and the external chamber in a region, of the first substrate, facing the blanking deflector, and includes an electrode which fills a via formed in the region. The device is electrically connected to the blanking deflector via the electrode.
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