发明申请
- 专利标题: GRAPHENE SENSOR
- 专利标题(中): 石墨传感器
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申请号: US13605107申请日: 2012-09-06
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公开(公告)号: US20120329193A1公开(公告)日: 2012-12-27
- 发明人: Dechao Guo , Shu-Jen Han , Chung-Hsun Lin , Ning Su
- 申请人: Dechao Guo , Shu-Jen Han , Chung-Hsun Lin , Ning Su
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method for forming a sensor includes forming a channel in substrate, forming a sacrificial layer in the channel, forming a sensor having a first dielectric layer disposed on the substrate, a graphene layer disposed on the first dielectric layer, and a second dielectric layer disposed on the graphene layer, a source region, a drain region, and a gate region, wherein the gate region is disposed on the sacrificial layer removing the sacrificial layer from the channel.
公开/授权文献
- US09068936B2 Graphene sensor 公开/授权日:2015-06-30
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