发明申请
- 专利标题: SILICON CARBIDE SEMICONDUCTOR DEVICE
- 专利标题(中): 硅碳化硅半导体器件
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申请号: US13531793申请日: 2012-06-25
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公开(公告)号: US20130001592A1公开(公告)日: 2013-01-03
- 发明人: Shinichiro Miyahara , Masahiro Sugimoto , Hidefumi Takaya , Yukihiko Watanabe , Narumasa Soejima , Tsuyoshi Ishikawa
- 申请人: Shinichiro Miyahara , Masahiro Sugimoto , Hidefumi Takaya , Yukihiko Watanabe , Narumasa Soejima , Tsuyoshi Ishikawa
- 申请人地址: JP Toyota-city JP Kariya-city
- 专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA,DENSO CORPORATION
- 当前专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA,DENSO CORPORATION
- 当前专利权人地址: JP Toyota-city JP Kariya-city
- 优先权: JP2011-144320 20110629
- 主分类号: H01L29/161
- IPC分类号: H01L29/161
摘要:
In a silicon carbide semiconductor device, a plurality of trenches has a longitudinal direction in one direction and is arranged in a stripe pattern. Each of the trenches has first and second sidewalls extending in the longitudinal direction. The first sidewall is at a first acute angle to one of a (11-20) plane and a (1-100) plane, the second sidewall is at a second acute angle to the one of the (11-20) plane and the (1-100) plane, and the first acute angle is smaller than the second acute angle. A first conductivity type region is in contact with only the first sidewall in the first and second sidewalls of each of the trenches, and a current path is formed on only the first sidewall in the first and second sidewalls.
公开/授权文献
- US09136372B2 Silicon carbide semiconductor device 公开/授权日:2015-09-15
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